3/30/2010	10:40:35 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
3/30/2010	10:40:36 AM	Recipe started at 10:40 AM
3/30/2010	10:40:36 AM	Helium valve closed
3/30/2010	10:40:36 AM	H2 valve closed
3/30/2010	10:40:36 AM	BCl3 valve closed
3/30/2010	10:40:36 AM	PH3 valve closed
3/30/2010	10:40:36 AM	SiCl4 pre valve closed
3/30/2010	10:40:36 AM	SiCl4 post valve closed
3/30/2010	10:40:36 AM	Main Vac valve closed
3/30/2010	10:40:36 AM	Bypass valve closed
3/30/2010	10:40:36 AM	Bubbler valve closed
3/30/2010	10:40:36 AM	Helium MFC set to  0.000000
3/30/2010	10:40:36 AM	H2 MFC set to  0.000000
3/30/2010	10:40:36 AM	BCl3 MFC set to  0.000000
3/30/2010	10:40:36 AM	SiCl4 MFC set to  0.000000
3/30/2010	10:40:36 AM	Bypass solenoid MFC set to  0.000000
3/30/2010	10:40:36 AM	Tube furnace set to 0
3/30/2010	10:40:36 AM	Run finished at 10:40 AM
3/30/2010	10:40:36 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
3/30/2010	10:41:02 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/30/2010	10:41:02 AM	Recipe started at 10:41 AM
3/30/2010	10:41:02 AM	Helium valve closed
3/30/2010	10:41:02 AM	H2 valve closed
3/30/2010	10:41:02 AM	BCl3 valve closed
3/30/2010	10:41:02 AM	PH3 valve closed
3/30/2010	10:41:02 AM	SiCl4 pre valve closed
3/30/2010	10:41:02 AM	SiCl4 post valve closed
3/30/2010	10:41:02 AM	Main Vac valve closed
3/30/2010	10:41:02 AM	Bubbler valve closed
3/30/2010	10:41:02 AM	Bypass valve opened
3/30/2010	10:41:02 AM	Helium MFC set to  0.000000
3/30/2010	10:41:02 AM	H2 MFC set to  0.000000
3/30/2010	10:41:02 AM	BCl3 MFC set to  0.000000
3/30/2010	10:41:02 AM	SiCl4 MFC set to  0.000000
3/30/2010	10:41:02 AM	Bypass solenoid MFC set to  0.000000
3/30/2010	10:41:03 AM	Tube furnace set to 0
3/30/2010	10:41:03 AM	Helium valve closed
3/30/2010	10:41:03 AM	H2 valve closed
3/30/2010	10:41:03 AM	BCl3 valve closed
3/30/2010	10:41:03 AM	PH3 valve closed
3/30/2010	10:41:03 AM	SiCl4 pre valve closed
3/30/2010	10:41:03 AM	SiCl4 post valve closed
3/30/2010	10:41:03 AM	Bubbler valve closed
3/30/2010	10:41:03 AM	Main Vac valve opened
3/30/2010	10:41:03 AM	Bypass valve opened
3/30/2010	10:41:03 AM	Helium MFC set to  0.000000
3/30/2010	10:41:03 AM	H2 MFC set to  0.000000
3/30/2010	10:41:03 AM	BCl3 MFC set to  0.000000
3/30/2010	10:41:03 AM	SiCl4 MFC set to  0.000000
3/30/2010	10:41:03 AM	Bypass solenoid MFC set to  0.000000
3/30/2010	10:41:03 AM	Tube furnace set to 0
3/30/2010	10:41:03 AM	Run finished at 10:41 AM
3/30/2010	10:41:03 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/30/2010	10:43:43 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/30/2010	10:43:43 AM	Recipe started at 10:43 AM
3/30/2010	10:43:43 AM	H2 valve closed
3/30/2010	10:43:43 AM	BCl3 valve closed
3/30/2010	10:43:43 AM	PH3 valve closed
3/30/2010	10:43:43 AM	SiCl4 pre valve closed
3/30/2010	10:43:43 AM	SiCl4 post valve closed
3/30/2010	10:43:43 AM	Main Vac valve closed
3/30/2010	10:43:43 AM	Bypass valve closed
3/30/2010	10:43:43 AM	Bubbler valve closed
3/30/2010	10:43:43 AM	Helium valve opened
3/30/2010	10:43:43 AM	Helium MFC set to  500.000000
3/30/2010	10:43:43 AM	H2 MFC set to  0.000000
3/30/2010	10:43:43 AM	BCl3 MFC set to  0.000000
3/30/2010	10:43:43 AM	SiCl4 MFC set to  0.000000
3/30/2010	10:43:43 AM	Bypass solenoid MFC set to  0.000000
3/30/2010	10:43:43 AM	Tube furnace set to 0
3/30/2010	10:45:03 AM	Helium valve closed
3/30/2010	10:45:03 AM	H2 valve closed
3/30/2010	10:45:03 AM	BCl3 valve closed
3/30/2010	10:45:03 AM	PH3 valve closed
3/30/2010	10:45:03 AM	SiCl4 pre valve closed
3/30/2010	10:45:03 AM	SiCl4 post valve closed
3/30/2010	10:45:03 AM	Main Vac valve closed
3/30/2010	10:45:03 AM	Bypass valve closed
3/30/2010	10:45:03 AM	Bubbler valve closed
3/30/2010	10:45:03 AM	Helium MFC set to  0.000000
3/30/2010	10:45:03 AM	H2 MFC set to  0.000000
3/30/2010	10:45:03 AM	BCl3 MFC set to  0.000000
3/30/2010	10:45:03 AM	SiCl4 MFC set to  0.000000
3/30/2010	10:45:03 AM	Bypass solenoid MFC set to  0.000000
3/30/2010	10:45:03 AM	Tube furnace set to 0
3/30/2010	10:45:04 AM	Run finished at 10:45 AM
3/30/2010	10:45:04 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/30/2010	10:51:11 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/30/2010	10:51:12 AM	Recipe started at 10:51 AM
3/30/2010	10:51:12 AM	Helium valve closed
3/30/2010	10:51:12 AM	H2 valve closed
3/30/2010	10:51:12 AM	BCl3 valve closed
3/30/2010	10:51:12 AM	PH3 valve closed
3/30/2010	10:51:12 AM	SiCl4 pre valve closed
3/30/2010	10:51:12 AM	SiCl4 post valve closed
3/30/2010	10:51:12 AM	Main Vac valve closed
3/30/2010	10:51:12 AM	Bubbler valve closed
3/30/2010	10:51:12 AM	Bypass valve opened
3/30/2010	10:51:12 AM	Helium MFC set to  0.000000
3/30/2010	10:51:12 AM	H2 MFC set to  0.000000
3/30/2010	10:51:12 AM	BCl3 MFC set to  0.000000
3/30/2010	10:51:12 AM	SiCl4 MFC set to  0.000000
3/30/2010	10:51:12 AM	Bypass solenoid MFC set to  0.000000
3/30/2010	10:51:12 AM	Tube furnace set to 0
3/30/2010	10:51:42 AM	Helium valve closed
3/30/2010	10:51:42 AM	H2 valve closed
3/30/2010	10:51:42 AM	BCl3 valve closed
3/30/2010	10:51:42 AM	PH3 valve closed
3/30/2010	10:51:42 AM	SiCl4 pre valve closed
3/30/2010	10:51:42 AM	SiCl4 post valve closed
3/30/2010	10:51:42 AM	Bubbler valve closed
3/30/2010	10:51:42 AM	Main Vac valve opened
3/30/2010	10:51:42 AM	Bypass valve opened
3/30/2010	10:51:42 AM	Helium MFC set to  0.000000
3/30/2010	10:51:42 AM	H2 MFC set to  0.000000
3/30/2010	10:51:42 AM	BCl3 MFC set to  0.000000
3/30/2010	10:51:42 AM	SiCl4 MFC set to  0.000000
3/30/2010	10:51:42 AM	Bypass solenoid MFC set to  0.000000
3/30/2010	10:51:43 AM	Tube furnace set to 0
3/30/2010	10:51:43 AM	Run finished at 10:51 AM
3/30/2010	10:51:43 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/30/2010	10:53:42 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
3/30/2010	10:53:47 AM	Recipe started at 10:53 AM
3/30/2010	10:53:47 AM	H2 valve closed
3/30/2010	10:53:47 AM	BCl3 valve closed
3/30/2010	10:53:47 AM	PH3 valve closed
3/30/2010	10:53:47 AM	SiCl4 pre valve closed
3/30/2010	10:53:47 AM	SiCl4 post valve closed
3/30/2010	10:53:47 AM	Main Vac valve closed
3/30/2010	10:53:47 AM	Bypass valve closed
3/30/2010	10:53:47 AM	Bubbler valve closed
3/30/2010	10:53:47 AM	Helium valve opened
3/30/2010	10:53:47 AM	Helium MFC set to  500.000000
3/30/2010	10:53:47 AM	H2 MFC set to  0.000000
3/30/2010	10:53:47 AM	BCl3 MFC set to  0.000000
3/30/2010	10:53:47 AM	SiCl4 MFC set to  0.000000
3/30/2010	10:53:47 AM	Bypass solenoid MFC set to  0.000000
3/30/2010	10:53:47 AM	Tube furnace set to 0
3/30/2010	10:55:10 AM	Helium valve closed
3/30/2010	10:55:10 AM	H2 valve closed
3/30/2010	10:55:10 AM	BCl3 valve closed
3/30/2010	10:55:10 AM	PH3 valve closed
3/30/2010	10:55:10 AM	SiCl4 pre valve closed
3/30/2010	10:55:10 AM	SiCl4 post valve closed
3/30/2010	10:55:10 AM	Main Vac valve closed
3/30/2010	10:55:10 AM	Bypass valve closed
3/30/2010	10:55:10 AM	Bubbler valve closed
3/30/2010	10:55:10 AM	Helium MFC set to  0.000000
3/30/2010	10:55:10 AM	H2 MFC set to  0.000000
3/30/2010	10:55:10 AM	BCl3 MFC set to  0.000000
3/30/2010	10:55:10 AM	SiCl4 MFC set to  0.000000
3/30/2010	10:55:10 AM	Bypass solenoid MFC set to  0.000000
3/30/2010	10:55:10 AM	Tube furnace set to 0
3/30/2010	10:55:25 AM	Helium valve closed
3/30/2010	10:55:25 AM	H2 valve closed
3/30/2010	10:55:25 AM	BCl3 valve closed
3/30/2010	10:55:25 AM	PH3 valve closed
3/30/2010	10:55:25 AM	SiCl4 pre valve closed
3/30/2010	10:55:25 AM	SiCl4 post valve closed
3/30/2010	10:55:25 AM	Main Vac valve closed
3/30/2010	10:55:25 AM	Bubbler valve closed
3/30/2010	10:55:25 AM	Bypass valve opened
3/30/2010	10:55:25 AM	Helium MFC set to  0.000000
3/30/2010	10:55:25 AM	H2 MFC set to  0.000000
3/30/2010	10:55:25 AM	BCl3 MFC set to  0.000000
3/30/2010	10:55:25 AM	SiCl4 MFC set to  0.000000
3/30/2010	10:55:25 AM	Bypass solenoid MFC set to  0.000000
3/30/2010	10:55:25 AM	Tube furnace set to 0
3/30/2010	10:55:47 AM	Helium valve closed
3/30/2010	10:55:47 AM	H2 valve closed
3/30/2010	10:55:47 AM	BCl3 valve closed
3/30/2010	10:55:47 AM	PH3 valve closed
3/30/2010	10:55:47 AM	SiCl4 pre valve closed
3/30/2010	10:55:47 AM	SiCl4 post valve closed
3/30/2010	10:55:47 AM	Bubbler valve closed
3/30/2010	10:55:47 AM	Main Vac valve opened
3/30/2010	10:55:47 AM	Bypass valve opened
3/30/2010	10:55:47 AM	Helium MFC set to  0.000000
3/30/2010	10:55:47 AM	H2 MFC set to  0.000000
3/30/2010	10:55:47 AM	BCl3 MFC set to  0.000000
3/30/2010	10:55:47 AM	SiCl4 MFC set to  0.000000
3/30/2010	10:55:47 AM	Bypass solenoid MFC set to  0.000000
3/30/2010	10:55:48 AM	Tube furnace set to 0
3/30/2010	11:00:48 AM	H2 valve closed
3/30/2010	11:00:48 AM	BCl3 valve closed
3/30/2010	11:00:48 AM	PH3 valve closed
3/30/2010	11:00:48 AM	SiCl4 pre valve closed
3/30/2010	11:00:48 AM	SiCl4 post valve closed
3/30/2010	11:00:48 AM	Main Vac valve closed
3/30/2010	11:00:48 AM	Bypass valve closed
3/30/2010	11:00:48 AM	Bubbler valve closed
3/30/2010	11:00:48 AM	Helium valve opened
3/30/2010	11:00:48 AM	Helium MFC set to  500.000000
3/30/2010	11:00:48 AM	H2 MFC set to  0.000000
3/30/2010	11:00:48 AM	BCl3 MFC set to  0.000000
3/30/2010	11:00:48 AM	SiCl4 MFC set to  0.000000
3/30/2010	11:00:48 AM	Bypass solenoid MFC set to  0.000000
3/30/2010	11:00:48 AM	Tube furnace set to 0
3/30/2010	11:02:10 AM	Helium valve closed
3/30/2010	11:02:10 AM	H2 valve closed
3/30/2010	11:02:10 AM	BCl3 valve closed
3/30/2010	11:02:10 AM	PH3 valve closed
3/30/2010	11:02:10 AM	SiCl4 pre valve closed
3/30/2010	11:02:10 AM	SiCl4 post valve closed
3/30/2010	11:02:10 AM	Main Vac valve closed
3/30/2010	11:02:10 AM	Bypass valve closed
3/30/2010	11:02:10 AM	Bubbler valve closed
3/30/2010	11:02:10 AM	Helium MFC set to  0.000000
3/30/2010	11:02:10 AM	H2 MFC set to  0.000000
3/30/2010	11:02:10 AM	BCl3 MFC set to  0.000000
3/30/2010	11:02:10 AM	SiCl4 MFC set to  0.000000
3/30/2010	11:02:10 AM	Bypass solenoid MFC set to  0.000000
3/30/2010	11:02:10 AM	Tube furnace set to 0
3/30/2010	11:02:25 AM	Helium valve closed
3/30/2010	11:02:25 AM	H2 valve closed
3/30/2010	11:02:25 AM	BCl3 valve closed
3/30/2010	11:02:25 AM	PH3 valve closed
3/30/2010	11:02:25 AM	SiCl4 pre valve closed
3/30/2010	11:02:25 AM	SiCl4 post valve closed
3/30/2010	11:02:25 AM	Main Vac valve closed
3/30/2010	11:02:25 AM	Bubbler valve closed
3/30/2010	11:02:25 AM	Bypass valve opened
3/30/2010	11:02:25 AM	Helium MFC set to  0.000000
3/30/2010	11:02:25 AM	H2 MFC set to  0.000000
3/30/2010	11:02:25 AM	BCl3 MFC set to  0.000000
3/30/2010	11:02:25 AM	SiCl4 MFC set to  0.000000
3/30/2010	11:02:25 AM	Bypass solenoid MFC set to  0.000000
3/30/2010	11:02:25 AM	Tube furnace set to 0
3/30/2010	11:02:48 AM	Helium valve closed
3/30/2010	11:02:48 AM	H2 valve closed
3/30/2010	11:02:48 AM	BCl3 valve closed
3/30/2010	11:02:48 AM	PH3 valve closed
3/30/2010	11:02:48 AM	SiCl4 pre valve closed
3/30/2010	11:02:48 AM	SiCl4 post valve closed
3/30/2010	11:02:48 AM	Bubbler valve closed
3/30/2010	11:02:48 AM	Main Vac valve opened
3/30/2010	11:02:48 AM	Bypass valve opened
3/30/2010	11:02:48 AM	Helium MFC set to  0.000000
3/30/2010	11:02:48 AM	H2 MFC set to  0.000000
3/30/2010	11:02:48 AM	BCl3 MFC set to  0.000000
3/30/2010	11:02:48 AM	SiCl4 MFC set to  0.000000
3/30/2010	11:02:48 AM	Bypass solenoid MFC set to  0.000000
3/30/2010	11:02:48 AM	Tube furnace set to 0
3/30/2010	11:07:48 AM	H2 valve closed
3/30/2010	11:07:48 AM	BCl3 valve closed
3/30/2010	11:07:48 AM	PH3 valve closed
3/30/2010	11:07:48 AM	SiCl4 pre valve closed
3/30/2010	11:07:48 AM	SiCl4 post valve closed
3/30/2010	11:07:48 AM	Main Vac valve closed
3/30/2010	11:07:48 AM	Bypass valve closed
3/30/2010	11:07:48 AM	Bubbler valve closed
3/30/2010	11:07:48 AM	Helium valve opened
3/30/2010	11:07:48 AM	Helium MFC set to  500.000000
3/30/2010	11:07:48 AM	H2 MFC set to  0.000000
3/30/2010	11:07:48 AM	BCl3 MFC set to  0.000000
3/30/2010	11:07:48 AM	SiCl4 MFC set to  0.000000
3/30/2010	11:07:48 AM	Bypass solenoid MFC set to  0.000000
3/30/2010	11:07:48 AM	Tube furnace set to 0
3/30/2010	11:09:10 AM	Helium valve closed
3/30/2010	11:09:10 AM	H2 valve closed
3/30/2010	11:09:10 AM	BCl3 valve closed
3/30/2010	11:09:10 AM	PH3 valve closed
3/30/2010	11:09:10 AM	SiCl4 pre valve closed
3/30/2010	11:09:10 AM	SiCl4 post valve closed
3/30/2010	11:09:10 AM	Main Vac valve closed
3/30/2010	11:09:10 AM	Bypass valve closed
3/30/2010	11:09:10 AM	Bubbler valve closed
3/30/2010	11:09:10 AM	Helium MFC set to  0.000000
3/30/2010	11:09:10 AM	H2 MFC set to  0.000000
3/30/2010	11:09:10 AM	BCl3 MFC set to  0.000000
3/30/2010	11:09:10 AM	SiCl4 MFC set to  0.000000
3/30/2010	11:09:10 AM	Bypass solenoid MFC set to  0.000000
3/30/2010	11:09:10 AM	Tube furnace set to 0
3/30/2010	11:09:25 AM	Helium valve closed
3/30/2010	11:09:25 AM	H2 valve closed
3/30/2010	11:09:25 AM	BCl3 valve closed
3/30/2010	11:09:25 AM	PH3 valve closed
3/30/2010	11:09:25 AM	SiCl4 pre valve closed
3/30/2010	11:09:25 AM	SiCl4 post valve closed
3/30/2010	11:09:25 AM	Main Vac valve closed
3/30/2010	11:09:25 AM	Bubbler valve closed
3/30/2010	11:09:25 AM	Bypass valve opened
3/30/2010	11:09:25 AM	Helium MFC set to  0.000000
3/30/2010	11:09:25 AM	H2 MFC set to  0.000000
3/30/2010	11:09:25 AM	BCl3 MFC set to  0.000000
3/30/2010	11:09:25 AM	SiCl4 MFC set to  0.000000
3/30/2010	11:09:25 AM	Bypass solenoid MFC set to  0.000000
3/30/2010	11:09:26 AM	Tube furnace set to 0
3/30/2010	11:09:48 AM	Helium valve closed
3/30/2010	11:09:48 AM	H2 valve closed
3/30/2010	11:09:48 AM	BCl3 valve closed
3/30/2010	11:09:48 AM	PH3 valve closed
3/30/2010	11:09:48 AM	SiCl4 pre valve closed
3/30/2010	11:09:48 AM	SiCl4 post valve closed
3/30/2010	11:09:48 AM	Bubbler valve closed
3/30/2010	11:09:48 AM	Main Vac valve opened
3/30/2010	11:09:48 AM	Bypass valve opened
3/30/2010	11:09:48 AM	Helium MFC set to  0.000000
3/30/2010	11:09:48 AM	H2 MFC set to  0.000000
3/30/2010	11:09:48 AM	BCl3 MFC set to  0.000000
3/30/2010	11:09:48 AM	SiCl4 MFC set to  0.000000
3/30/2010	11:09:48 AM	Bypass solenoid MFC set to  0.000000
3/30/2010	11:09:48 AM	Tube furnace set to 0
3/30/2010	11:12:57 AM	Run aborted at 11:12 AM
3/30/2010	11:12:57 AM	Helium valve closed
3/30/2010	11:12:57 AM	H2 valve closed
3/30/2010	11:12:57 AM	BCl3 valve closed
3/30/2010	11:12:57 AM	PH3 valve closed
3/30/2010	11:12:57 AM	SiCl4 pre valve closed
3/30/2010	11:12:57 AM	SiCl4 post valve closed
3/30/2010	11:12:57 AM	Bypass valve closed
3/30/2010	11:12:57 AM	Main Vac valve closed
3/30/2010	11:12:57 AM	Bubbler valve closed
3/30/2010	11:12:57 AM	Helium MFC set to  0.000000
3/30/2010	11:12:57 AM	H2 MFC set to  0.000000
3/30/2010	11:12:57 AM	BCl3 MFC set to  0.000000
3/30/2010	11:12:57 AM	SiCl4 MFC set to  0.000000
3/30/2010	11:12:57 AM	Tube furnace set to 0
3/30/2010	11:12:57 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
3/30/2010	11:13:16 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/30/2010	11:13:17 AM	Recipe started at 11:13 AM
3/30/2010	11:13:17 AM	Helium valve closed
3/30/2010	11:13:17 AM	H2 valve closed
3/30/2010	11:13:17 AM	BCl3 valve closed
3/30/2010	11:13:17 AM	PH3 valve closed
3/30/2010	11:13:17 AM	SiCl4 pre valve closed
3/30/2010	11:13:17 AM	SiCl4 post valve closed
3/30/2010	11:13:17 AM	Main Vac valve closed
3/30/2010	11:13:17 AM	Bubbler valve closed
3/30/2010	11:13:17 AM	Bypass valve opened
3/30/2010	11:13:17 AM	Helium MFC set to  0.000000
3/30/2010	11:13:17 AM	H2 MFC set to  0.000000
3/30/2010	11:13:17 AM	BCl3 MFC set to  0.000000
3/30/2010	11:13:17 AM	SiCl4 MFC set to  0.000000
3/30/2010	11:13:17 AM	Bypass solenoid MFC set to  0.000000
3/30/2010	11:13:17 AM	Tube furnace set to 0
3/30/2010	11:13:17 AM	Helium valve closed
3/30/2010	11:13:17 AM	H2 valve closed
3/30/2010	11:13:17 AM	BCl3 valve closed
3/30/2010	11:13:17 AM	PH3 valve closed
3/30/2010	11:13:17 AM	SiCl4 pre valve closed
3/30/2010	11:13:17 AM	SiCl4 post valve closed
3/30/2010	11:13:17 AM	Bubbler valve closed
3/30/2010	11:13:17 AM	Main Vac valve opened
3/30/2010	11:13:17 AM	Bypass valve opened
3/30/2010	11:13:17 AM	Helium MFC set to  0.000000
3/30/2010	11:13:17 AM	H2 MFC set to  0.000000
3/30/2010	11:13:17 AM	BCl3 MFC set to  0.000000
3/30/2010	11:13:17 AM	SiCl4 MFC set to  0.000000
3/30/2010	11:13:17 AM	Bypass solenoid MFC set to  0.000000
3/30/2010	11:13:17 AM	Tube furnace set to 0
3/30/2010	11:13:18 AM	Run finished at 11:13 AM
3/30/2010	11:13:18 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/30/2010	11:13:46 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
3/30/2010	11:13:51 AM	Recipe started at 11:13 AM
3/30/2010	11:13:51 AM	H2 valve closed
3/30/2010	11:13:51 AM	BCl3 valve closed
3/30/2010	11:13:51 AM	PH3 valve closed
3/30/2010	11:13:51 AM	SiCl4 pre valve closed
3/30/2010	11:13:51 AM	SiCl4 post valve closed
3/30/2010	11:13:51 AM	Main Vac valve closed
3/30/2010	11:13:51 AM	Bypass valve closed
3/30/2010	11:13:51 AM	Bubbler valve closed
3/30/2010	11:13:51 AM	Helium valve opened
3/30/2010	11:13:51 AM	Helium MFC set to  500.000000
3/30/2010	11:13:51 AM	H2 MFC set to  0.000000
3/30/2010	11:13:51 AM	BCl3 MFC set to  0.000000
3/30/2010	11:13:51 AM	SiCl4 MFC set to  0.000000
3/30/2010	11:13:51 AM	Bypass solenoid MFC set to  0.000000
3/30/2010	11:13:52 AM	Tube furnace set to 0
3/30/2010	11:15:14 AM	Helium valve closed
3/30/2010	11:15:14 AM	H2 valve closed
3/30/2010	11:15:14 AM	BCl3 valve closed
3/30/2010	11:15:14 AM	PH3 valve closed
3/30/2010	11:15:14 AM	SiCl4 pre valve closed
3/30/2010	11:15:14 AM	SiCl4 post valve closed
3/30/2010	11:15:14 AM	Main Vac valve closed
3/30/2010	11:15:14 AM	Bypass valve closed
3/30/2010	11:15:14 AM	Bubbler valve closed
3/30/2010	11:15:14 AM	Helium MFC set to  0.000000
3/30/2010	11:15:14 AM	H2 MFC set to  0.000000
3/30/2010	11:15:14 AM	BCl3 MFC set to  0.000000
3/30/2010	11:15:14 AM	SiCl4 MFC set to  0.000000
3/30/2010	11:15:14 AM	Bypass solenoid MFC set to  0.000000
3/30/2010	11:15:14 AM	Tube furnace set to 0
3/30/2010	11:15:29 AM	Helium valve closed
3/30/2010	11:15:29 AM	H2 valve closed
3/30/2010	11:15:29 AM	BCl3 valve closed
3/30/2010	11:15:29 AM	PH3 valve closed
3/30/2010	11:15:29 AM	SiCl4 pre valve closed
3/30/2010	11:15:29 AM	SiCl4 post valve closed
3/30/2010	11:15:29 AM	Main Vac valve closed
3/30/2010	11:15:29 AM	Bubbler valve closed
3/30/2010	11:15:29 AM	Bypass valve opened
3/30/2010	11:15:29 AM	Helium MFC set to  0.000000
3/30/2010	11:15:29 AM	H2 MFC set to  0.000000
3/30/2010	11:15:29 AM	BCl3 MFC set to  0.000000
3/30/2010	11:15:29 AM	SiCl4 MFC set to  0.000000
3/30/2010	11:15:29 AM	Bypass solenoid MFC set to  0.000000
3/30/2010	11:15:29 AM	Tube furnace set to 0
3/30/2010	11:15:51 AM	Helium valve closed
3/30/2010	11:15:51 AM	H2 valve closed
3/30/2010	11:15:51 AM	BCl3 valve closed
3/30/2010	11:15:51 AM	PH3 valve closed
3/30/2010	11:15:51 AM	SiCl4 pre valve closed
3/30/2010	11:15:51 AM	SiCl4 post valve closed
3/30/2010	11:15:51 AM	Bubbler valve closed
3/30/2010	11:15:51 AM	Main Vac valve opened
3/30/2010	11:15:51 AM	Bypass valve opened
3/30/2010	11:15:51 AM	Helium MFC set to  0.000000
3/30/2010	11:15:51 AM	H2 MFC set to  0.000000
3/30/2010	11:15:51 AM	BCl3 MFC set to  0.000000
3/30/2010	11:15:51 AM	SiCl4 MFC set to  0.000000
3/30/2010	11:15:51 AM	Bypass solenoid MFC set to  0.000000
3/30/2010	11:15:52 AM	Tube furnace set to 0
3/30/2010	11:20:52 AM	H2 valve closed
3/30/2010	11:20:52 AM	BCl3 valve closed
3/30/2010	11:20:52 AM	PH3 valve closed
3/30/2010	11:20:52 AM	SiCl4 pre valve closed
3/30/2010	11:20:52 AM	SiCl4 post valve closed
3/30/2010	11:20:52 AM	Main Vac valve closed
3/30/2010	11:20:52 AM	Bypass valve closed
3/30/2010	11:20:52 AM	Bubbler valve closed
3/30/2010	11:20:52 AM	Helium valve opened
3/30/2010	11:20:52 AM	Helium MFC set to  500.000000
3/30/2010	11:20:52 AM	H2 MFC set to  0.000000
3/30/2010	11:20:52 AM	BCl3 MFC set to  0.000000
3/30/2010	11:20:52 AM	SiCl4 MFC set to  0.000000
3/30/2010	11:20:52 AM	Bypass solenoid MFC set to  0.000000
3/30/2010	11:20:52 AM	Tube furnace set to 0
3/30/2010	11:22:14 AM	Helium valve closed
3/30/2010	11:22:14 AM	H2 valve closed
3/30/2010	11:22:14 AM	BCl3 valve closed
3/30/2010	11:22:14 AM	PH3 valve closed
3/30/2010	11:22:14 AM	SiCl4 pre valve closed
3/30/2010	11:22:14 AM	SiCl4 post valve closed
3/30/2010	11:22:14 AM	Main Vac valve closed
3/30/2010	11:22:14 AM	Bypass valve closed
3/30/2010	11:22:14 AM	Bubbler valve closed
3/30/2010	11:22:14 AM	Helium MFC set to  0.000000
3/30/2010	11:22:14 AM	H2 MFC set to  0.000000
3/30/2010	11:22:14 AM	BCl3 MFC set to  0.000000
3/30/2010	11:22:14 AM	SiCl4 MFC set to  0.000000
3/30/2010	11:22:14 AM	Bypass solenoid MFC set to  0.000000
3/30/2010	11:22:14 AM	Tube furnace set to 0
3/30/2010	11:22:29 AM	Helium valve closed
3/30/2010	11:22:29 AM	H2 valve closed
3/30/2010	11:22:29 AM	BCl3 valve closed
3/30/2010	11:22:29 AM	PH3 valve closed
3/30/2010	11:22:29 AM	SiCl4 pre valve closed
3/30/2010	11:22:29 AM	SiCl4 post valve closed
3/30/2010	11:22:29 AM	Main Vac valve closed
3/30/2010	11:22:29 AM	Bubbler valve closed
3/30/2010	11:22:29 AM	Bypass valve opened
3/30/2010	11:22:29 AM	Helium MFC set to  0.000000
3/30/2010	11:22:29 AM	H2 MFC set to  0.000000
3/30/2010	11:22:29 AM	BCl3 MFC set to  0.000000
3/30/2010	11:22:29 AM	SiCl4 MFC set to  0.000000
3/30/2010	11:22:29 AM	Bypass solenoid MFC set to  0.000000
3/30/2010	11:22:29 AM	Tube furnace set to 0
3/30/2010	11:22:52 AM	Helium valve closed
3/30/2010	11:22:52 AM	H2 valve closed
3/30/2010	11:22:52 AM	BCl3 valve closed
3/30/2010	11:22:52 AM	PH3 valve closed
3/30/2010	11:22:52 AM	SiCl4 pre valve closed
3/30/2010	11:22:52 AM	SiCl4 post valve closed
3/30/2010	11:22:52 AM	Bubbler valve closed
3/30/2010	11:22:52 AM	Main Vac valve opened
3/30/2010	11:22:52 AM	Bypass valve opened
3/30/2010	11:22:52 AM	Helium MFC set to  0.000000
3/30/2010	11:22:52 AM	H2 MFC set to  0.000000
3/30/2010	11:22:52 AM	BCl3 MFC set to  0.000000
3/30/2010	11:22:52 AM	SiCl4 MFC set to  0.000000
3/30/2010	11:22:52 AM	Bypass solenoid MFC set to  0.000000
3/30/2010	11:22:52 AM	Tube furnace set to 0
3/30/2010	11:27:52 AM	H2 valve closed
3/30/2010	11:27:52 AM	BCl3 valve closed
3/30/2010	11:27:52 AM	PH3 valve closed
3/30/2010	11:27:52 AM	SiCl4 pre valve closed
3/30/2010	11:27:52 AM	SiCl4 post valve closed
3/30/2010	11:27:52 AM	Main Vac valve closed
3/30/2010	11:27:52 AM	Bypass valve closed
3/30/2010	11:27:52 AM	Bubbler valve closed
3/30/2010	11:27:52 AM	Helium valve opened
3/30/2010	11:27:52 AM	Helium MFC set to  500.000000
3/30/2010	11:27:52 AM	H2 MFC set to  0.000000
3/30/2010	11:27:52 AM	BCl3 MFC set to  0.000000
3/30/2010	11:27:52 AM	SiCl4 MFC set to  0.000000
3/30/2010	11:27:52 AM	Bypass solenoid MFC set to  0.000000
3/30/2010	11:27:52 AM	Tube furnace set to 0
3/30/2010	11:29:14 AM	Helium valve closed
3/30/2010	11:29:14 AM	H2 valve closed
3/30/2010	11:29:14 AM	BCl3 valve closed
3/30/2010	11:29:14 AM	PH3 valve closed
3/30/2010	11:29:14 AM	SiCl4 pre valve closed
3/30/2010	11:29:14 AM	SiCl4 post valve closed
3/30/2010	11:29:14 AM	Main Vac valve closed
3/30/2010	11:29:14 AM	Bypass valve closed
3/30/2010	11:29:14 AM	Bubbler valve closed
3/30/2010	11:29:14 AM	Helium MFC set to  0.000000
3/30/2010	11:29:14 AM	H2 MFC set to  0.000000
3/30/2010	11:29:14 AM	BCl3 MFC set to  0.000000
3/30/2010	11:29:14 AM	SiCl4 MFC set to  0.000000
3/30/2010	11:29:14 AM	Bypass solenoid MFC set to  0.000000
3/30/2010	11:29:15 AM	Tube furnace set to 0
3/30/2010	11:29:30 AM	Helium valve closed
3/30/2010	11:29:30 AM	H2 valve closed
3/30/2010	11:29:30 AM	BCl3 valve closed
3/30/2010	11:29:30 AM	PH3 valve closed
3/30/2010	11:29:30 AM	SiCl4 pre valve closed
3/30/2010	11:29:30 AM	SiCl4 post valve closed
3/30/2010	11:29:30 AM	Main Vac valve closed
3/30/2010	11:29:30 AM	Bubbler valve closed
3/30/2010	11:29:30 AM	Bypass valve opened
3/30/2010	11:29:30 AM	Helium MFC set to  0.000000
3/30/2010	11:29:30 AM	H2 MFC set to  0.000000
3/30/2010	11:29:30 AM	BCl3 MFC set to  0.000000
3/30/2010	11:29:30 AM	SiCl4 MFC set to  0.000000
3/30/2010	11:29:30 AM	Bypass solenoid MFC set to  0.000000
3/30/2010	11:29:30 AM	Tube furnace set to 0
3/30/2010	11:29:52 AM	Helium valve closed
3/30/2010	11:29:52 AM	H2 valve closed
3/30/2010	11:29:52 AM	BCl3 valve closed
3/30/2010	11:29:52 AM	PH3 valve closed
3/30/2010	11:29:52 AM	SiCl4 pre valve closed
3/30/2010	11:29:52 AM	SiCl4 post valve closed
3/30/2010	11:29:52 AM	Bubbler valve closed
3/30/2010	11:29:52 AM	Main Vac valve opened
3/30/2010	11:29:52 AM	Bypass valve opened
3/30/2010	11:29:52 AM	Helium MFC set to  0.000000
3/30/2010	11:29:52 AM	H2 MFC set to  0.000000
3/30/2010	11:29:52 AM	BCl3 MFC set to  0.000000
3/30/2010	11:29:52 AM	SiCl4 MFC set to  0.000000
3/30/2010	11:29:52 AM	Bypass solenoid MFC set to  0.000000
3/30/2010	11:29:52 AM	Tube furnace set to 0
3/30/2010	11:33:03 AM	Helium valve closed
3/30/2010	11:33:03 AM	H2 valve closed
3/30/2010	11:33:03 AM	BCl3 valve closed
3/30/2010	11:33:03 AM	PH3 valve closed
3/30/2010	11:33:03 AM	SiCl4 pre valve closed
3/30/2010	11:33:03 AM	SiCl4 post valve closed
3/30/2010	11:33:03 AM	Bubbler valve closed
3/30/2010	11:33:03 AM	Main Vac valve opened
3/30/2010	11:33:03 AM	Bypass valve opened
3/30/2010	11:33:03 AM	Helium MFC set to  0.000000
3/30/2010	11:33:03 AM	H2 MFC set to  0.000000
3/30/2010	11:33:03 AM	BCl3 MFC set to  0.000000
3/30/2010	11:33:03 AM	SiCl4 MFC set to  0.000000
3/30/2010	11:33:03 AM	Bypass solenoid MFC set to  0.000000
3/30/2010	11:33:04 AM	Tube furnace set to 0
3/30/2010	11:33:05 AM	Run finished at 11:33 AM
3/30/2010	11:33:05 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
3/30/2010	11:35:35 AM	Program started after a nonstandard shutdown
3/30/2010	11:35:35 AM	Helium valve closed
3/30/2010	11:35:35 AM	H2 valve closed
3/30/2010	11:35:35 AM	BCl3 valve closed
3/30/2010	11:35:35 AM	PH3 valve closed
3/30/2010	11:35:35 AM	SiCl4 pre valve closed
3/30/2010	11:35:35 AM	SiCl4 post valve closed
3/30/2010	11:35:35 AM	Main Vac valve closed
3/30/2010	11:35:35 AM	Bypass valve closed
3/30/2010	11:35:35 AM	Bubbler valve closed
3/30/2010	11:35:35 AM	Helium MFC set to  0.000000
3/30/2010	11:35:35 AM	H2 MFC set to  0.000000
3/30/2010	11:35:35 AM	BCl3 MFC set to  0.000000
3/30/2010	11:35:35 AM	SiCl4 MFC set to  0.000000
3/30/2010	11:35:35 AM	Bypass solenoid MFC set to  760.000000
3/30/2010	11:35:35 AM	Tube furnace set to 0
3/30/2010	11:35:38 AM	Bypass valve opened
3/30/2010	11:35:38 AM	Main Vac valve opened
3/30/2010	11:41:52 AM	Recipe started at 11:41 AM
3/30/2010	11:41:52 AM	Helium valve closed
3/30/2010	11:41:52 AM	BCl3 valve closed
3/30/2010	11:41:52 AM	PH3 valve closed
3/30/2010	11:41:52 AM	SiCl4 pre valve closed
3/30/2010	11:41:52 AM	SiCl4 post valve closed
3/30/2010	11:41:52 AM	Main Vac valve closed
3/30/2010	11:41:52 AM	Bypass valve closed
3/30/2010	11:41:52 AM	Bubbler valve closed
3/30/2010	11:41:52 AM	H2 valve opened
3/30/2010	11:41:52 AM	Helium MFC set to  0.000000
3/30/2010	11:41:52 AM	H2 MFC set to  500.000000
3/30/2010	11:41:52 AM	BCl3 MFC set to  0.000000
3/30/2010	11:41:52 AM	SiCl4 MFC set to  0.000000
3/30/2010	11:41:52 AM	Bypass solenoid MFC set to  0.000000
3/30/2010	11:41:52 AM	Tube furnace set to 0
3/30/2010	11:43:14 AM	Helium valve closed
3/30/2010	11:43:14 AM	BCl3 valve closed
3/30/2010	11:43:14 AM	PH3 valve closed
3/30/2010	11:43:14 AM	SiCl4 pre valve closed
3/30/2010	11:43:14 AM	SiCl4 post valve closed
3/30/2010	11:43:14 AM	Main Vac valve closed
3/30/2010	11:43:14 AM	Bypass valve closed
3/30/2010	11:43:14 AM	H2 valve opened
3/30/2010	11:43:14 AM	Bubbler valve opened
3/30/2010	11:43:14 AM	Helium MFC set to  0.000000
3/30/2010	11:43:14 AM	H2 MFC set to  500.000000
3/30/2010	11:43:14 AM	BCl3 MFC set to  0.000000
3/30/2010	11:43:14 AM	SiCl4 MFC set to  0.000000
3/30/2010	11:43:14 AM	Bypass solenoid MFC set to  0.000000
3/30/2010	11:43:15 AM	Tube furnace set to 1000
3/30/2010	12:03:14 PM	Helium valve closed
3/30/2010	12:03:14 PM	BCl3 valve closed
3/30/2010	12:03:14 PM	PH3 valve closed
3/30/2010	12:03:14 PM	Main Vac valve closed
3/30/2010	12:03:14 PM	Bypass valve closed
3/30/2010	12:03:14 PM	H2 valve opened
3/30/2010	12:03:14 PM	SiCl4 pre valve opened
3/30/2010	12:03:14 PM	SiCl4 post valve opened
3/30/2010	12:03:14 PM	Bubbler valve opened
3/30/2010	12:03:14 PM	Helium MFC set to  0.000000
3/30/2010	12:03:14 PM	H2 MFC set to  500.000000
3/30/2010	12:03:14 PM	BCl3 MFC set to  0.000000
3/30/2010	12:03:14 PM	SiCl4 MFC set to  325.000000
3/30/2010	12:03:14 PM	Bypass solenoid MFC set to  0.000000
3/30/2010	12:03:15 PM	Tube furnace set to 1000
3/30/2010	12:23:15 PM	H2 valve closed
3/30/2010	12:23:15 PM	BCl3 valve closed
3/30/2010	12:23:15 PM	PH3 valve closed
3/30/2010	12:23:15 PM	SiCl4 pre valve closed
3/30/2010	12:23:15 PM	SiCl4 post valve closed
3/30/2010	12:23:15 PM	Main Vac valve closed
3/30/2010	12:23:15 PM	Bypass valve closed
3/30/2010	12:23:15 PM	Helium valve opened
3/30/2010	12:23:15 PM	Bubbler valve opened
3/30/2010	12:23:15 PM	Helium MFC set to  500.000000
3/30/2010	12:23:15 PM	H2 MFC set to  0.000000
3/30/2010	12:23:15 PM	BCl3 MFC set to  0.000000
3/30/2010	12:23:15 PM	SiCl4 MFC set to  0.000000
3/30/2010	12:23:15 PM	Bypass solenoid MFC set to  0.000000
3/30/2010	12:23:15 PM	Tube furnace set to 750
3/30/2010	12:43:15 PM	H2 valve closed
3/30/2010	12:43:15 PM	BCl3 valve closed
3/30/2010	12:43:15 PM	PH3 valve closed
3/30/2010	12:43:15 PM	SiCl4 pre valve closed
3/30/2010	12:43:15 PM	SiCl4 post valve closed
3/30/2010	12:43:15 PM	Main Vac valve closed
3/30/2010	12:43:15 PM	Bypass valve closed
3/30/2010	12:43:15 PM	Helium valve opened
3/30/2010	12:43:15 PM	Bubbler valve opened
3/30/2010	12:43:15 PM	Helium MFC set to  500.000000
3/30/2010	12:43:15 PM	H2 MFC set to  0.000000
3/30/2010	12:43:15 PM	BCl3 MFC set to  0.000000
3/30/2010	12:43:15 PM	SiCl4 MFC set to  0.000000
3/30/2010	12:43:15 PM	Bypass solenoid MFC set to  0.000000
3/30/2010	12:43:15 PM	Tube furnace set to 0
3/30/2010	1:03:15 PM	Helium valve closed
3/30/2010	1:03:15 PM	H2 valve closed
3/30/2010	1:03:15 PM	BCl3 valve closed
3/30/2010	1:03:15 PM	PH3 valve closed
3/30/2010	1:03:15 PM	SiCl4 pre valve closed
3/30/2010	1:03:15 PM	SiCl4 post valve closed
3/30/2010	1:03:15 PM	Main Vac valve closed
3/30/2010	1:03:15 PM	Bypass valve closed
3/30/2010	1:03:15 PM	Bubbler valve closed
3/30/2010	1:03:15 PM	Helium MFC set to  0.000000
3/30/2010	1:03:15 PM	H2 MFC set to  0.000000
3/30/2010	1:03:15 PM	BCl3 MFC set to  0.000000
3/30/2010	1:03:15 PM	SiCl4 MFC set to  0.000000
3/30/2010	1:03:15 PM	Bypass solenoid MFC set to  0.000000
3/30/2010	1:03:15 PM	Tube furnace set to 0
3/30/2010	1:03:15 PM	Run finished at 1:03 PM
3/30/2010	2:36:28 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/30/2010	2:36:28 PM	Recipe started at 2:36 PM
3/30/2010	2:36:28 PM	H2 valve closed
3/30/2010	2:36:28 PM	BCl3 valve closed
3/30/2010	2:36:28 PM	PH3 valve closed
3/30/2010	2:36:28 PM	SiCl4 pre valve closed
3/30/2010	2:36:28 PM	SiCl4 post valve closed
3/30/2010	2:36:28 PM	Main Vac valve closed
3/30/2010	2:36:28 PM	Bypass valve closed
3/30/2010	2:36:28 PM	Bubbler valve closed
3/30/2010	2:36:28 PM	Helium valve opened
3/30/2010	2:36:28 PM	Helium MFC set to  500.000000
3/30/2010	2:36:28 PM	H2 MFC set to  0.000000
3/30/2010	2:36:28 PM	BCl3 MFC set to  0.000000
3/30/2010	2:36:28 PM	SiCl4 MFC set to  0.000000
3/30/2010	2:36:28 PM	Bypass solenoid MFC set to  0.000000
3/30/2010	2:36:28 PM	Tube furnace set to 0
3/30/2010	2:36:32 PM	Helium valve closed
3/30/2010	2:36:32 PM	H2 valve closed
3/30/2010	2:36:32 PM	BCl3 valve closed
3/30/2010	2:36:32 PM	PH3 valve closed
3/30/2010	2:36:32 PM	SiCl4 pre valve closed
3/30/2010	2:36:32 PM	SiCl4 post valve closed
3/30/2010	2:36:32 PM	Main Vac valve closed
3/30/2010	2:36:32 PM	Bypass valve closed
3/30/2010	2:36:32 PM	Bubbler valve closed
3/30/2010	2:36:32 PM	Helium MFC set to  0.000000
3/30/2010	2:36:32 PM	H2 MFC set to  0.000000
3/30/2010	2:36:32 PM	BCl3 MFC set to  0.000000
3/30/2010	2:36:32 PM	SiCl4 MFC set to  0.000000
3/30/2010	2:36:32 PM	Bypass solenoid MFC set to  0.000000
3/30/2010	2:36:32 PM	Tube furnace set to 0
3/30/2010	2:36:33 PM	Run finished at 2:36 PM
3/30/2010	2:36:33 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/30/2010	2:41:01 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/30/2010	2:41:02 PM	Recipe started at 2:41 PM
3/30/2010	2:41:02 PM	Helium valve closed
3/30/2010	2:41:02 PM	H2 valve closed
3/30/2010	2:41:02 PM	BCl3 valve closed
3/30/2010	2:41:02 PM	PH3 valve closed
3/30/2010	2:41:02 PM	SiCl4 pre valve closed
3/30/2010	2:41:02 PM	SiCl4 post valve closed
3/30/2010	2:41:02 PM	Main Vac valve closed
3/30/2010	2:41:02 PM	Bubbler valve closed
3/30/2010	2:41:02 PM	Bypass valve opened
3/30/2010	2:41:02 PM	Helium MFC set to  0.000000
3/30/2010	2:41:02 PM	H2 MFC set to  0.000000
3/30/2010	2:41:02 PM	BCl3 MFC set to  0.000000
3/30/2010	2:41:02 PM	SiCl4 MFC set to  0.000000
3/30/2010	2:41:02 PM	Bypass solenoid MFC set to  0.000000
3/30/2010	2:41:02 PM	Tube furnace set to 0
3/30/2010	2:41:33 PM	Helium valve closed
3/30/2010	2:41:33 PM	H2 valve closed
3/30/2010	2:41:33 PM	BCl3 valve closed
3/30/2010	2:41:33 PM	PH3 valve closed
3/30/2010	2:41:33 PM	SiCl4 pre valve closed
3/30/2010	2:41:33 PM	SiCl4 post valve closed
3/30/2010	2:41:33 PM	Bubbler valve closed
3/30/2010	2:41:33 PM	Main Vac valve opened
3/30/2010	2:41:33 PM	Bypass valve opened
3/30/2010	2:41:33 PM	Helium MFC set to  0.000000
3/30/2010	2:41:33 PM	H2 MFC set to  0.000000
3/30/2010	2:41:33 PM	BCl3 MFC set to  0.000000
3/30/2010	2:41:33 PM	SiCl4 MFC set to  0.000000
3/30/2010	2:41:33 PM	Bypass solenoid MFC set to  0.000000
3/30/2010	2:41:33 PM	Tube furnace set to 0
3/30/2010	2:41:33 PM	Run finished at 2:41 PM
3/30/2010	2:41:33 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/30/2010	2:42:13 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
3/30/2010	2:42:18 PM	Recipe started at 2:42 PM
3/30/2010	2:42:18 PM	H2 valve closed
3/30/2010	2:42:18 PM	BCl3 valve closed
3/30/2010	2:42:18 PM	PH3 valve closed
3/30/2010	2:42:18 PM	SiCl4 pre valve closed
3/30/2010	2:42:18 PM	SiCl4 post valve closed
3/30/2010	2:42:18 PM	Main Vac valve closed
3/30/2010	2:42:18 PM	Bypass valve closed
3/30/2010	2:42:18 PM	Bubbler valve closed
3/30/2010	2:42:18 PM	Helium valve opened
3/30/2010	2:42:18 PM	Helium MFC set to  500.000000
3/30/2010	2:42:18 PM	H2 MFC set to  0.000000
3/30/2010	2:42:18 PM	BCl3 MFC set to  0.000000
3/30/2010	2:42:18 PM	SiCl4 MFC set to  0.000000
3/30/2010	2:42:18 PM	Bypass solenoid MFC set to  0.000000
3/30/2010	2:42:18 PM	Tube furnace set to 0
3/30/2010	2:43:39 PM	Helium valve closed
3/30/2010	2:43:39 PM	H2 valve closed
3/30/2010	2:43:39 PM	BCl3 valve closed
3/30/2010	2:43:39 PM	PH3 valve closed
3/30/2010	2:43:39 PM	SiCl4 pre valve closed
3/30/2010	2:43:39 PM	SiCl4 post valve closed
3/30/2010	2:43:39 PM	Main Vac valve closed
3/30/2010	2:43:39 PM	Bypass valve closed
3/30/2010	2:43:39 PM	Bubbler valve closed
3/30/2010	2:43:39 PM	Helium MFC set to  0.000000
3/30/2010	2:43:39 PM	H2 MFC set to  0.000000
3/30/2010	2:43:39 PM	BCl3 MFC set to  0.000000
3/30/2010	2:43:39 PM	SiCl4 MFC set to  0.000000
3/30/2010	2:43:39 PM	Bypass solenoid MFC set to  0.000000
3/30/2010	2:43:39 PM	Tube furnace set to 0
3/30/2010	2:43:54 PM	Helium valve closed
3/30/2010	2:43:54 PM	H2 valve closed
3/30/2010	2:43:54 PM	BCl3 valve closed
3/30/2010	2:43:54 PM	PH3 valve closed
3/30/2010	2:43:54 PM	SiCl4 pre valve closed
3/30/2010	2:43:54 PM	SiCl4 post valve closed
3/30/2010	2:43:54 PM	Main Vac valve closed
3/30/2010	2:43:54 PM	Bubbler valve closed
3/30/2010	2:43:54 PM	Bypass valve opened
3/30/2010	2:43:54 PM	Helium MFC set to  0.000000
3/30/2010	2:43:54 PM	H2 MFC set to  0.000000
3/30/2010	2:43:54 PM	BCl3 MFC set to  0.000000
3/30/2010	2:43:54 PM	SiCl4 MFC set to  0.000000
3/30/2010	2:43:54 PM	Bypass solenoid MFC set to  0.000000
3/30/2010	2:43:54 PM	Tube furnace set to 0
3/30/2010	2:44:16 PM	Helium valve closed
3/30/2010	2:44:16 PM	H2 valve closed
3/30/2010	2:44:16 PM	BCl3 valve closed
3/30/2010	2:44:16 PM	PH3 valve closed
3/30/2010	2:44:16 PM	SiCl4 pre valve closed
3/30/2010	2:44:16 PM	SiCl4 post valve closed
3/30/2010	2:44:16 PM	Bubbler valve closed
3/30/2010	2:44:16 PM	Main Vac valve opened
3/30/2010	2:44:16 PM	Bypass valve opened
3/30/2010	2:44:16 PM	Helium MFC set to  0.000000
3/30/2010	2:44:16 PM	H2 MFC set to  0.000000
3/30/2010	2:44:16 PM	BCl3 MFC set to  0.000000
3/30/2010	2:44:16 PM	SiCl4 MFC set to  0.000000
3/30/2010	2:44:16 PM	Bypass solenoid MFC set to  0.000000
3/30/2010	2:44:16 PM	Tube furnace set to 0
3/30/2010	2:49:16 PM	H2 valve closed
3/30/2010	2:49:16 PM	BCl3 valve closed
3/30/2010	2:49:16 PM	PH3 valve closed
3/30/2010	2:49:16 PM	SiCl4 pre valve closed
3/30/2010	2:49:16 PM	SiCl4 post valve closed
3/30/2010	2:49:16 PM	Main Vac valve closed
3/30/2010	2:49:16 PM	Bypass valve closed
3/30/2010	2:49:16 PM	Bubbler valve closed
3/30/2010	2:49:16 PM	Helium valve opened
3/30/2010	2:49:16 PM	Helium MFC set to  500.000000
3/30/2010	2:49:16 PM	H2 MFC set to  0.000000
3/30/2010	2:49:16 PM	BCl3 MFC set to  0.000000
3/30/2010	2:49:16 PM	SiCl4 MFC set to  0.000000
3/30/2010	2:49:16 PM	Bypass solenoid MFC set to  0.000000
3/30/2010	2:49:16 PM	Tube furnace set to 0
3/30/2010	2:50:37 PM	Helium valve closed
3/30/2010	2:50:37 PM	H2 valve closed
3/30/2010	2:50:37 PM	BCl3 valve closed
3/30/2010	2:50:38 PM	PH3 valve closed
3/30/2010	2:50:38 PM	SiCl4 pre valve closed
3/30/2010	2:50:38 PM	SiCl4 post valve closed
3/30/2010	2:50:38 PM	Main Vac valve closed
3/30/2010	2:50:38 PM	Bypass valve closed
3/30/2010	2:50:38 PM	Bubbler valve closed
3/30/2010	2:50:38 PM	Helium MFC set to  0.000000
3/30/2010	2:50:38 PM	H2 MFC set to  0.000000
3/30/2010	2:50:38 PM	BCl3 MFC set to  0.000000
3/30/2010	2:50:38 PM	SiCl4 MFC set to  0.000000
3/30/2010	2:50:38 PM	Bypass solenoid MFC set to  0.000000
3/30/2010	2:50:38 PM	Tube furnace set to 0
3/30/2010	2:50:53 PM	Helium valve closed
3/30/2010	2:50:53 PM	H2 valve closed
3/30/2010	2:50:53 PM	BCl3 valve closed
3/30/2010	2:50:53 PM	PH3 valve closed
3/30/2010	2:50:53 PM	SiCl4 pre valve closed
3/30/2010	2:50:53 PM	SiCl4 post valve closed
3/30/2010	2:50:53 PM	Main Vac valve closed
3/30/2010	2:50:53 PM	Bubbler valve closed
3/30/2010	2:50:53 PM	Bypass valve opened
3/30/2010	2:50:53 PM	Helium MFC set to  0.000000
3/30/2010	2:50:53 PM	H2 MFC set to  0.000000
3/30/2010	2:50:53 PM	BCl3 MFC set to  0.000000
3/30/2010	2:50:53 PM	SiCl4 MFC set to  0.000000
3/30/2010	2:50:53 PM	Bypass solenoid MFC set to  0.000000
3/30/2010	2:50:53 PM	Tube furnace set to 0
3/30/2010	2:51:15 PM	Helium valve closed
3/30/2010	2:51:15 PM	H2 valve closed
3/30/2010	2:51:15 PM	BCl3 valve closed
3/30/2010	2:51:15 PM	PH3 valve closed
3/30/2010	2:51:15 PM	SiCl4 pre valve closed
3/30/2010	2:51:15 PM	SiCl4 post valve closed
3/30/2010	2:51:15 PM	Bubbler valve closed
3/30/2010	2:51:15 PM	Main Vac valve opened
3/30/2010	2:51:15 PM	Bypass valve opened
3/30/2010	2:51:15 PM	Helium MFC set to  0.000000
3/30/2010	2:51:15 PM	H2 MFC set to  0.000000
3/30/2010	2:51:15 PM	BCl3 MFC set to  0.000000
3/30/2010	2:51:15 PM	SiCl4 MFC set to  0.000000
3/30/2010	2:51:15 PM	Bypass solenoid MFC set to  0.000000
3/30/2010	2:51:15 PM	Tube furnace set to 0
3/30/2010	2:56:15 PM	H2 valve closed
3/30/2010	2:56:15 PM	BCl3 valve closed
3/30/2010	2:56:15 PM	PH3 valve closed
3/30/2010	2:56:15 PM	SiCl4 pre valve closed
3/30/2010	2:56:15 PM	SiCl4 post valve closed
3/30/2010	2:56:15 PM	Main Vac valve closed
3/30/2010	2:56:15 PM	Bypass valve closed
3/30/2010	2:56:15 PM	Bubbler valve closed
3/30/2010	2:56:15 PM	Helium valve opened
3/30/2010	2:56:15 PM	Helium MFC set to  500.000000
3/30/2010	2:56:15 PM	H2 MFC set to  0.000000
3/30/2010	2:56:15 PM	BCl3 MFC set to  0.000000
3/30/2010	2:56:15 PM	SiCl4 MFC set to  0.000000
3/30/2010	2:56:15 PM	Bypass solenoid MFC set to  0.000000
3/30/2010	2:56:15 PM	Tube furnace set to 0
3/30/2010	2:57:36 PM	Helium valve closed
3/30/2010	2:57:36 PM	H2 valve closed
3/30/2010	2:57:36 PM	BCl3 valve closed
3/30/2010	2:57:36 PM	PH3 valve closed
3/30/2010	2:57:36 PM	SiCl4 pre valve closed
3/30/2010	2:57:37 PM	SiCl4 post valve closed
3/30/2010	2:57:37 PM	Main Vac valve closed
3/30/2010	2:57:37 PM	Bypass valve closed
3/30/2010	2:57:37 PM	Bubbler valve closed
3/30/2010	2:57:37 PM	Helium MFC set to  0.000000
3/30/2010	2:57:37 PM	H2 MFC set to  0.000000
3/30/2010	2:57:37 PM	BCl3 MFC set to  0.000000
3/30/2010	2:57:37 PM	SiCl4 MFC set to  0.000000
3/30/2010	2:57:37 PM	Bypass solenoid MFC set to  0.000000
3/30/2010	2:57:37 PM	Tube furnace set to 0
3/30/2010	2:57:52 PM	Helium valve closed
3/30/2010	2:57:52 PM	H2 valve closed
3/30/2010	2:57:52 PM	BCl3 valve closed
3/30/2010	2:57:52 PM	PH3 valve closed
3/30/2010	2:57:52 PM	SiCl4 pre valve closed
3/30/2010	2:57:52 PM	SiCl4 post valve closed
3/30/2010	2:57:52 PM	Main Vac valve closed
3/30/2010	2:57:52 PM	Bubbler valve closed
3/30/2010	2:57:52 PM	Bypass valve opened
3/30/2010	2:57:52 PM	Helium MFC set to  0.000000
3/30/2010	2:57:52 PM	H2 MFC set to  0.000000
3/30/2010	2:57:52 PM	BCl3 MFC set to  0.000000
3/30/2010	2:57:52 PM	SiCl4 MFC set to  0.000000
3/30/2010	2:57:52 PM	Bypass solenoid MFC set to  0.000000
3/30/2010	2:57:52 PM	Tube furnace set to 0
3/30/2010	2:58:14 PM	Helium valve closed
3/30/2010	2:58:14 PM	H2 valve closed
3/30/2010	2:58:14 PM	BCl3 valve closed
3/30/2010	2:58:14 PM	PH3 valve closed
3/30/2010	2:58:14 PM	SiCl4 pre valve closed
3/30/2010	2:58:14 PM	SiCl4 post valve closed
3/30/2010	2:58:14 PM	Bubbler valve closed
3/30/2010	2:58:14 PM	Main Vac valve opened
3/30/2010	2:58:14 PM	Bypass valve opened
3/30/2010	2:58:14 PM	Helium MFC set to  0.000000
3/30/2010	2:58:14 PM	H2 MFC set to  0.000000
3/30/2010	2:58:14 PM	BCl3 MFC set to  0.000000
3/30/2010	2:58:14 PM	SiCl4 MFC set to  0.000000
3/30/2010	2:58:14 PM	Bypass solenoid MFC set to  0.000000
3/30/2010	2:58:14 PM	Tube furnace set to 0
3/30/2010	2:59:29 PM	Helium valve closed
3/30/2010	2:59:29 PM	H2 valve closed
3/30/2010	2:59:29 PM	BCl3 valve closed
3/30/2010	2:59:29 PM	PH3 valve closed
3/30/2010	2:59:29 PM	SiCl4 pre valve closed
3/30/2010	2:59:29 PM	SiCl4 post valve closed
3/30/2010	2:59:29 PM	Bubbler valve closed
3/30/2010	2:59:29 PM	Main Vac valve opened
3/30/2010	2:59:29 PM	Bypass valve opened
3/30/2010	2:59:29 PM	Helium MFC set to  0.000000
3/30/2010	2:59:29 PM	H2 MFC set to  0.000000
3/30/2010	2:59:29 PM	BCl3 MFC set to  0.000000
3/30/2010	2:59:29 PM	SiCl4 MFC set to  0.000000
3/30/2010	2:59:29 PM	Bypass solenoid MFC set to  0.000000
3/30/2010	2:59:29 PM	Tube furnace set to 0
3/30/2010	2:59:30 PM	Run finished at 2:59 PM
3/30/2010	2:59:30 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
3/30/2010	2:59:34 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
3/30/2010	2:59:40 PM	Recipe started at 2:59 PM
3/30/2010	2:59:40 PM	H2 valve closed
3/30/2010	2:59:40 PM	BCl3 valve closed
3/30/2010	2:59:40 PM	PH3 valve closed
3/30/2010	2:59:40 PM	SiCl4 pre valve closed
3/30/2010	2:59:40 PM	SiCl4 post valve closed
3/30/2010	2:59:40 PM	Main Vac valve closed
3/30/2010	2:59:40 PM	Bypass valve closed
3/30/2010	2:59:40 PM	Bubbler valve closed
3/30/2010	2:59:40 PM	Helium valve opened
3/30/2010	2:59:40 PM	Helium MFC set to  500.000000
3/30/2010	2:59:40 PM	H2 MFC set to  0.000000
3/30/2010	2:59:40 PM	BCl3 MFC set to  0.000000
3/30/2010	2:59:40 PM	SiCl4 MFC set to  0.000000
3/30/2010	2:59:40 PM	Bypass solenoid MFC set to  0.000000
3/30/2010	2:59:40 PM	Tube furnace set to 0
3/30/2010	3:01:02 PM	Helium valve closed
3/30/2010	3:01:02 PM	H2 valve closed
3/30/2010	3:01:02 PM	BCl3 valve closed
3/30/2010	3:01:02 PM	PH3 valve closed
3/30/2010	3:01:02 PM	SiCl4 pre valve closed
3/30/2010	3:01:02 PM	SiCl4 post valve closed
3/30/2010	3:01:02 PM	Main Vac valve closed
3/30/2010	3:01:02 PM	Bypass valve closed
3/30/2010	3:01:02 PM	Bubbler valve closed
3/30/2010	3:01:02 PM	Helium MFC set to  0.000000
3/30/2010	3:01:02 PM	H2 MFC set to  0.000000
3/30/2010	3:01:02 PM	BCl3 MFC set to  0.000000
3/30/2010	3:01:02 PM	SiCl4 MFC set to  0.000000
3/30/2010	3:01:02 PM	Bypass solenoid MFC set to  0.000000
3/30/2010	3:01:02 PM	Tube furnace set to 0
3/30/2010	3:01:17 PM	Helium valve closed
3/30/2010	3:01:17 PM	H2 valve closed
3/30/2010	3:01:17 PM	BCl3 valve closed
3/30/2010	3:01:17 PM	PH3 valve closed
3/30/2010	3:01:17 PM	SiCl4 pre valve closed
3/30/2010	3:01:17 PM	SiCl4 post valve closed
3/30/2010	3:01:17 PM	Main Vac valve closed
3/30/2010	3:01:17 PM	Bubbler valve closed
3/30/2010	3:01:17 PM	Bypass valve opened
3/30/2010	3:01:17 PM	Helium MFC set to  0.000000
3/30/2010	3:01:17 PM	H2 MFC set to  0.000000
3/30/2010	3:01:17 PM	BCl3 MFC set to  0.000000
3/30/2010	3:01:17 PM	SiCl4 MFC set to  0.000000
3/30/2010	3:01:17 PM	Bypass solenoid MFC set to  0.000000
3/30/2010	3:01:17 PM	Tube furnace set to 0
3/30/2010	3:01:39 PM	Helium valve closed
3/30/2010	3:01:39 PM	H2 valve closed
3/30/2010	3:01:39 PM	BCl3 valve closed
3/30/2010	3:01:39 PM	PH3 valve closed
3/30/2010	3:01:39 PM	SiCl4 pre valve closed
3/30/2010	3:01:39 PM	SiCl4 post valve closed
3/30/2010	3:01:39 PM	Bubbler valve closed
3/30/2010	3:01:39 PM	Main Vac valve opened
3/30/2010	3:01:39 PM	Bypass valve opened
3/30/2010	3:01:39 PM	Helium MFC set to  0.000000
3/30/2010	3:01:39 PM	H2 MFC set to  0.000000
3/30/2010	3:01:39 PM	BCl3 MFC set to  0.000000
3/30/2010	3:01:39 PM	SiCl4 MFC set to  0.000000
3/30/2010	3:01:39 PM	Bypass solenoid MFC set to  0.000000
3/30/2010	3:01:39 PM	Tube furnace set to 0
3/30/2010	3:06:39 PM	H2 valve closed
3/30/2010	3:06:39 PM	BCl3 valve closed
3/30/2010	3:06:39 PM	PH3 valve closed
3/30/2010	3:06:39 PM	SiCl4 pre valve closed
3/30/2010	3:06:39 PM	SiCl4 post valve closed
3/30/2010	3:06:39 PM	Main Vac valve closed
3/30/2010	3:06:39 PM	Bypass valve closed
3/30/2010	3:06:39 PM	Bubbler valve closed
3/30/2010	3:06:39 PM	Helium valve opened
3/30/2010	3:06:39 PM	Helium MFC set to  500.000000
3/30/2010	3:06:39 PM	H2 MFC set to  0.000000
3/30/2010	3:06:39 PM	BCl3 MFC set to  0.000000
3/30/2010	3:06:39 PM	SiCl4 MFC set to  0.000000
3/30/2010	3:06:39 PM	Bypass solenoid MFC set to  0.000000
3/30/2010	3:06:39 PM	Tube furnace set to 0
3/30/2010	3:08:01 PM	Helium valve closed
3/30/2010	3:08:01 PM	H2 valve closed
3/30/2010	3:08:01 PM	BCl3 valve closed
3/30/2010	3:08:01 PM	PH3 valve closed
3/30/2010	3:08:01 PM	SiCl4 pre valve closed
3/30/2010	3:08:01 PM	SiCl4 post valve closed
3/30/2010	3:08:01 PM	Main Vac valve closed
3/30/2010	3:08:01 PM	Bypass valve closed
3/30/2010	3:08:01 PM	Bubbler valve closed
3/30/2010	3:08:01 PM	Helium MFC set to  0.000000
3/30/2010	3:08:01 PM	H2 MFC set to  0.000000
3/30/2010	3:08:01 PM	BCl3 MFC set to  0.000000
3/30/2010	3:08:01 PM	SiCl4 MFC set to  0.000000
3/30/2010	3:08:01 PM	Bypass solenoid MFC set to  0.000000
3/30/2010	3:08:01 PM	Tube furnace set to 0
3/30/2010	3:08:16 PM	Helium valve closed
3/30/2010	3:08:16 PM	H2 valve closed
3/30/2010	3:08:16 PM	BCl3 valve closed
3/30/2010	3:08:16 PM	PH3 valve closed
3/30/2010	3:08:16 PM	SiCl4 pre valve closed
3/30/2010	3:08:16 PM	SiCl4 post valve closed
3/30/2010	3:08:16 PM	Main Vac valve closed
3/30/2010	3:08:16 PM	Bubbler valve closed
3/30/2010	3:08:16 PM	Bypass valve opened
3/30/2010	3:08:16 PM	Helium MFC set to  0.000000
3/30/2010	3:08:16 PM	H2 MFC set to  0.000000
3/30/2010	3:08:16 PM	BCl3 MFC set to  0.000000
3/30/2010	3:08:16 PM	SiCl4 MFC set to  0.000000
3/30/2010	3:08:16 PM	Bypass solenoid MFC set to  0.000000
3/30/2010	3:08:16 PM	Tube furnace set to 0
3/30/2010	3:08:38 PM	Helium valve closed
3/30/2010	3:08:38 PM	H2 valve closed
3/30/2010	3:08:38 PM	BCl3 valve closed
3/30/2010	3:08:38 PM	PH3 valve closed
3/30/2010	3:08:38 PM	SiCl4 pre valve closed
3/30/2010	3:08:38 PM	SiCl4 post valve closed
3/30/2010	3:08:38 PM	Bubbler valve closed
3/30/2010	3:08:38 PM	Main Vac valve opened
3/30/2010	3:08:38 PM	Bypass valve opened
3/30/2010	3:08:38 PM	Helium MFC set to  0.000000
3/30/2010	3:08:38 PM	H2 MFC set to  0.000000
3/30/2010	3:08:38 PM	BCl3 MFC set to  0.000000
3/30/2010	3:08:38 PM	SiCl4 MFC set to  0.000000
3/30/2010	3:08:38 PM	Bypass solenoid MFC set to  0.000000
3/30/2010	3:08:39 PM	Tube furnace set to 0
3/30/2010	3:13:39 PM	H2 valve closed
3/30/2010	3:13:39 PM	BCl3 valve closed
3/30/2010	3:13:39 PM	PH3 valve closed
3/30/2010	3:13:39 PM	SiCl4 pre valve closed
3/30/2010	3:13:39 PM	SiCl4 post valve closed
3/30/2010	3:13:39 PM	Main Vac valve closed
3/30/2010	3:13:39 PM	Bypass valve closed
3/30/2010	3:13:39 PM	Bubbler valve closed
3/30/2010	3:13:39 PM	Helium valve opened
3/30/2010	3:13:39 PM	Helium MFC set to  500.000000
3/30/2010	3:13:39 PM	H2 MFC set to  0.000000
3/30/2010	3:13:39 PM	BCl3 MFC set to  0.000000
3/30/2010	3:13:39 PM	SiCl4 MFC set to  0.000000
3/30/2010	3:13:39 PM	Bypass solenoid MFC set to  0.000000
3/30/2010	3:13:39 PM	Tube furnace set to 0
3/30/2010	3:15:01 PM	Helium valve closed
3/30/2010	3:15:01 PM	H2 valve closed
3/30/2010	3:15:01 PM	BCl3 valve closed
3/30/2010	3:15:01 PM	PH3 valve closed
3/30/2010	3:15:01 PM	SiCl4 pre valve closed
3/30/2010	3:15:01 PM	SiCl4 post valve closed
3/30/2010	3:15:01 PM	Main Vac valve closed
3/30/2010	3:15:01 PM	Bypass valve closed
3/30/2010	3:15:01 PM	Bubbler valve closed
3/30/2010	3:15:01 PM	Helium MFC set to  0.000000
3/30/2010	3:15:01 PM	H2 MFC set to  0.000000
3/30/2010	3:15:01 PM	BCl3 MFC set to  0.000000
3/30/2010	3:15:01 PM	SiCl4 MFC set to  0.000000
3/30/2010	3:15:01 PM	Bypass solenoid MFC set to  0.000000
3/30/2010	3:15:01 PM	Tube furnace set to 0
3/30/2010	3:15:16 PM	Helium valve closed
3/30/2010	3:15:16 PM	H2 valve closed
3/30/2010	3:15:16 PM	BCl3 valve closed
3/30/2010	3:15:16 PM	PH3 valve closed
3/30/2010	3:15:16 PM	SiCl4 pre valve closed
3/30/2010	3:15:16 PM	SiCl4 post valve closed
3/30/2010	3:15:16 PM	Main Vac valve closed
3/30/2010	3:15:16 PM	Bubbler valve closed
3/30/2010	3:15:16 PM	Bypass valve opened
3/30/2010	3:15:16 PM	Helium MFC set to  0.000000
3/30/2010	3:15:16 PM	H2 MFC set to  0.000000
3/30/2010	3:15:16 PM	BCl3 MFC set to  0.000000
3/30/2010	3:15:16 PM	SiCl4 MFC set to  0.000000
3/30/2010	3:15:16 PM	Bypass solenoid MFC set to  0.000000
3/30/2010	3:15:16 PM	Tube furnace set to 0
3/30/2010	3:15:38 PM	Helium valve closed
3/30/2010	3:15:38 PM	H2 valve closed
3/30/2010	3:15:38 PM	BCl3 valve closed
3/30/2010	3:15:38 PM	PH3 valve closed
3/30/2010	3:15:38 PM	SiCl4 pre valve closed
3/30/2010	3:15:38 PM	SiCl4 post valve closed
3/30/2010	3:15:38 PM	Bubbler valve closed
3/30/2010	3:15:38 PM	Main Vac valve opened
3/30/2010	3:15:38 PM	Bypass valve opened
3/30/2010	3:15:38 PM	Helium MFC set to  0.000000
3/30/2010	3:15:38 PM	H2 MFC set to  0.000000
3/30/2010	3:15:38 PM	BCl3 MFC set to  0.000000
3/30/2010	3:15:38 PM	SiCl4 MFC set to  0.000000
3/30/2010	3:15:38 PM	Bypass solenoid MFC set to  0.000000
3/30/2010	3:15:38 PM	Tube furnace set to 0
3/30/2010	3:20:38 PM	Helium valve closed
3/30/2010	3:20:38 PM	H2 valve closed
3/30/2010	3:20:38 PM	BCl3 valve closed
3/30/2010	3:20:38 PM	PH3 valve closed
3/30/2010	3:20:38 PM	SiCl4 pre valve closed
3/30/2010	3:20:38 PM	SiCl4 post valve closed
3/30/2010	3:20:38 PM	Bubbler valve closed
3/30/2010	3:20:38 PM	Main Vac valve opened
3/30/2010	3:20:38 PM	Bypass valve opened
3/30/2010	3:20:38 PM	Helium MFC set to  0.000000
3/30/2010	3:20:38 PM	H2 MFC set to  0.000000
3/30/2010	3:20:38 PM	BCl3 MFC set to  0.000000
3/30/2010	3:20:38 PM	SiCl4 MFC set to  0.000000
3/30/2010	3:20:38 PM	Bypass solenoid MFC set to  0.000000
3/30/2010	3:20:39 PM	Tube furnace set to 0
3/30/2010	3:20:40 PM	Run finished at 3:20 PM
3/30/2010	3:20:40 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
3/30/2010	3:27:05 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
3/30/2010	3:27:06 PM	Recipe started at 3:27 PM
3/30/2010	3:27:06 PM	Helium valve closed
3/30/2010	3:27:06 PM	H2 valve closed
3/30/2010	3:27:06 PM	BCl3 valve closed
3/30/2010	3:27:06 PM	PH3 valve closed
3/30/2010	3:27:06 PM	SiCl4 pre valve closed
3/30/2010	3:27:06 PM	SiCl4 post valve closed
3/30/2010	3:27:06 PM	Main Vac valve closed
3/30/2010	3:27:06 PM	Bypass valve closed
3/30/2010	3:27:06 PM	Bubbler valve closed
3/30/2010	3:27:06 PM	Helium MFC set to  0.000000
3/30/2010	3:27:06 PM	H2 MFC set to  0.000000
3/30/2010	3:27:06 PM	BCl3 MFC set to  0.000000
3/30/2010	3:27:06 PM	SiCl4 MFC set to  0.000000
3/30/2010	3:27:06 PM	Bypass solenoid MFC set to  0.000000
3/30/2010	3:27:06 PM	Tube furnace set to 0
3/30/2010	3:27:06 PM	Run finished at 3:27 PM
3/30/2010	3:27:06 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
3/30/2010	3:27:35 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/30/2010	3:27:35 PM	Recipe started at 3:27 PM
3/30/2010	3:27:35 PM	Helium valve closed
3/30/2010	3:27:35 PM	H2 valve closed
3/30/2010	3:27:35 PM	BCl3 valve closed
3/30/2010	3:27:35 PM	PH3 valve closed
3/30/2010	3:27:35 PM	SiCl4 pre valve closed
3/30/2010	3:27:35 PM	SiCl4 post valve closed
3/30/2010	3:27:35 PM	Main Vac valve closed
3/30/2010	3:27:35 PM	Bubbler valve closed
3/30/2010	3:27:35 PM	Bypass valve opened
3/30/2010	3:27:35 PM	Helium MFC set to  0.000000
3/30/2010	3:27:35 PM	H2 MFC set to  0.000000
3/30/2010	3:27:35 PM	BCl3 MFC set to  0.000000
3/30/2010	3:27:35 PM	SiCl4 MFC set to  0.000000
3/30/2010	3:27:35 PM	Bypass solenoid MFC set to  0.000000
3/30/2010	3:27:35 PM	Tube furnace set to 0
3/30/2010	3:27:36 PM	Helium valve closed
3/30/2010	3:27:36 PM	H2 valve closed
3/30/2010	3:27:36 PM	BCl3 valve closed
3/30/2010	3:27:36 PM	PH3 valve closed
3/30/2010	3:27:36 PM	SiCl4 pre valve closed
3/30/2010	3:27:36 PM	SiCl4 post valve closed
3/30/2010	3:27:36 PM	Bubbler valve closed
3/30/2010	3:27:36 PM	Main Vac valve opened
3/30/2010	3:27:36 PM	Bypass valve opened
3/30/2010	3:27:36 PM	Helium MFC set to  0.000000
3/30/2010	3:27:36 PM	H2 MFC set to  0.000000
3/30/2010	3:27:36 PM	BCl3 MFC set to  0.000000
3/30/2010	3:27:36 PM	SiCl4 MFC set to  0.000000
3/30/2010	3:27:36 PM	Bypass solenoid MFC set to  0.000000
3/30/2010	3:27:36 PM	Tube furnace set to 0
3/30/2010	3:27:36 PM	Run finished at 3:27 PM
3/30/2010	3:27:36 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/30/2010	3:29:11 PM	Recipe started at 3:29 PM
3/30/2010	3:29:11 PM	Helium valve closed
3/30/2010	3:29:11 PM	BCl3 valve closed
3/30/2010	3:29:11 PM	PH3 valve closed
3/30/2010	3:29:11 PM	SiCl4 pre valve closed
3/30/2010	3:29:11 PM	SiCl4 post valve closed
3/30/2010	3:29:11 PM	Main Vac valve closed
3/30/2010	3:29:11 PM	Bypass valve closed
3/30/2010	3:29:11 PM	Bubbler valve closed
3/30/2010	3:29:11 PM	H2 valve opened
3/30/2010	3:29:11 PM	Helium MFC set to  0.000000
3/30/2010	3:29:11 PM	H2 MFC set to  500.000000
3/30/2010	3:29:11 PM	BCl3 MFC set to  0.000000
3/30/2010	3:29:11 PM	SiCl4 MFC set to  0.000000
3/30/2010	3:29:11 PM	Bypass solenoid MFC set to  0.000000
3/30/2010	3:29:12 PM	Tube furnace set to 0
3/30/2010	3:30:34 PM	Helium valve closed
3/30/2010	3:30:34 PM	BCl3 valve closed
3/30/2010	3:30:34 PM	PH3 valve closed
3/30/2010	3:30:34 PM	SiCl4 pre valve closed
3/30/2010	3:30:34 PM	SiCl4 post valve closed
3/30/2010	3:30:34 PM	Main Vac valve closed
3/30/2010	3:30:34 PM	Bypass valve closed
3/30/2010	3:30:34 PM	H2 valve opened
3/30/2010	3:30:34 PM	Bubbler valve opened
3/30/2010	3:30:34 PM	Helium MFC set to  0.000000
3/30/2010	3:30:34 PM	H2 MFC set to  500.000000
3/30/2010	3:30:34 PM	BCl3 MFC set to  0.000000
3/30/2010	3:30:34 PM	SiCl4 MFC set to  0.000000
3/30/2010	3:30:34 PM	Bypass solenoid MFC set to  0.000000
3/30/2010	3:30:34 PM	Tube furnace set to 1000
3/30/2010	3:52:12 PM	Helium valve closed
3/30/2010	3:52:12 PM	BCl3 valve closed
3/30/2010	3:52:12 PM	PH3 valve closed
3/30/2010	3:52:12 PM	Main Vac valve closed
3/30/2010	3:52:12 PM	Bypass valve closed
3/30/2010	3:52:12 PM	H2 valve opened
3/30/2010	3:52:12 PM	SiCl4 pre valve opened
3/30/2010	3:52:12 PM	SiCl4 post valve opened
3/30/2010	3:52:12 PM	Bubbler valve opened
3/30/2010	3:52:12 PM	Helium MFC set to  0.000000
3/30/2010	3:52:12 PM	H2 MFC set to  500.000000
3/30/2010	3:52:12 PM	BCl3 MFC set to  0.000000
3/30/2010	3:52:12 PM	SiCl4 MFC set to  375.000000
3/30/2010	3:52:12 PM	Bypass solenoid MFC set to  0.000000
3/30/2010	3:52:12 PM	Tube furnace set to 1000
3/30/2010	4:12:12 PM	H2 valve closed
3/30/2010	4:12:12 PM	BCl3 valve closed
3/30/2010	4:12:12 PM	PH3 valve closed
3/30/2010	4:12:12 PM	SiCl4 pre valve closed
3/30/2010	4:12:12 PM	SiCl4 post valve closed
3/30/2010	4:12:12 PM	Main Vac valve closed
3/30/2010	4:12:12 PM	Bypass valve closed
3/30/2010	4:12:12 PM	Helium valve opened
3/30/2010	4:12:12 PM	Bubbler valve opened
3/30/2010	4:12:12 PM	Helium MFC set to  500.000000
3/30/2010	4:12:12 PM	H2 MFC set to  0.000000
3/30/2010	4:12:12 PM	BCl3 MFC set to  0.000000
3/30/2010	4:12:12 PM	SiCl4 MFC set to  0.000000
3/30/2010	4:12:12 PM	Bypass solenoid MFC set to  0.000000
3/30/2010	4:12:12 PM	Tube furnace set to 750
3/30/2010	4:32:12 PM	H2 valve closed
3/30/2010	4:32:12 PM	BCl3 valve closed
3/30/2010	4:32:12 PM	PH3 valve closed
3/30/2010	4:32:12 PM	SiCl4 pre valve closed
3/30/2010	4:32:12 PM	SiCl4 post valve closed
3/30/2010	4:32:12 PM	Main Vac valve closed
3/30/2010	4:32:12 PM	Bypass valve closed
3/30/2010	4:32:12 PM	Helium valve opened
3/30/2010	4:32:12 PM	Bubbler valve opened
3/30/2010	4:32:12 PM	Helium MFC set to  500.000000
3/30/2010	4:32:12 PM	H2 MFC set to  0.000000
3/30/2010	4:32:12 PM	BCl3 MFC set to  0.000000
3/30/2010	4:32:12 PM	SiCl4 MFC set to  0.000000
3/30/2010	4:32:12 PM	Bypass solenoid MFC set to  0.000000
3/30/2010	4:32:12 PM	Tube furnace set to 0
3/30/2010	4:52:12 PM	Helium valve closed
3/30/2010	4:52:12 PM	H2 valve closed
3/30/2010	4:52:12 PM	BCl3 valve closed
3/30/2010	4:52:12 PM	PH3 valve closed
3/30/2010	4:52:12 PM	SiCl4 pre valve closed
3/30/2010	4:52:12 PM	SiCl4 post valve closed
3/30/2010	4:52:12 PM	Main Vac valve closed
3/30/2010	4:52:12 PM	Bypass valve closed
3/30/2010	4:52:12 PM	Bubbler valve closed
3/30/2010	4:52:12 PM	Helium MFC set to  0.000000
3/30/2010	4:52:12 PM	H2 MFC set to  0.000000
3/30/2010	4:52:12 PM	BCl3 MFC set to  0.000000
3/30/2010	4:52:12 PM	SiCl4 MFC set to  0.000000
3/30/2010	4:52:12 PM	Bypass solenoid MFC set to  0.000000
3/30/2010	4:52:12 PM	Tube furnace set to 0
3/30/2010	4:52:13 PM	Run finished at 4:52 PM
3/30/2010	4:53:41 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/30/2010	4:53:42 PM	Recipe started at 4:53 PM
3/30/2010	4:53:42 PM	H2 valve closed
3/30/2010	4:53:42 PM	BCl3 valve closed
3/30/2010	4:53:42 PM	PH3 valve closed
3/30/2010	4:53:42 PM	SiCl4 pre valve closed
3/30/2010	4:53:42 PM	SiCl4 post valve closed
3/30/2010	4:53:42 PM	Main Vac valve closed
3/30/2010	4:53:42 PM	Bypass valve closed
3/30/2010	4:53:42 PM	Bubbler valve closed
3/30/2010	4:53:42 PM	Helium valve opened
3/30/2010	4:53:42 PM	Helium MFC set to  500.000000
3/30/2010	4:53:42 PM	H2 MFC set to  0.000000
3/30/2010	4:53:42 PM	BCl3 MFC set to  0.000000
3/30/2010	4:53:42 PM	SiCl4 MFC set to  0.000000
3/30/2010	4:53:42 PM	Bypass solenoid MFC set to  0.000000
3/30/2010	4:53:42 PM	Tube furnace set to 0
3/30/2010	4:53:42 PM	Helium valve closed
3/30/2010	4:53:42 PM	H2 valve closed
3/30/2010	4:53:42 PM	BCl3 valve closed
3/30/2010	4:53:42 PM	PH3 valve closed
3/30/2010	4:53:42 PM	SiCl4 pre valve closed
3/30/2010	4:53:42 PM	SiCl4 post valve closed
3/30/2010	4:53:43 PM	Main Vac valve closed
3/30/2010	4:53:43 PM	Bypass valve closed
3/30/2010	4:53:43 PM	Bubbler valve closed
3/30/2010	4:53:43 PM	Helium MFC set to  0.000000
3/30/2010	4:53:43 PM	H2 MFC set to  0.000000
3/30/2010	4:53:43 PM	BCl3 MFC set to  0.000000
3/30/2010	4:53:43 PM	SiCl4 MFC set to  0.000000
3/30/2010	4:53:43 PM	Bypass solenoid MFC set to  0.000000
3/30/2010	4:53:43 PM	Tube furnace set to 0
3/30/2010	4:53:43 PM	Run finished at 4:53 PM
3/30/2010	4:53:43 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/30/2010	5:14:26 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/30/2010	5:14:27 PM	Recipe started at 5:14 PM
3/30/2010	5:14:27 PM	Helium valve closed
3/30/2010	5:14:27 PM	H2 valve closed
3/30/2010	5:14:27 PM	BCl3 valve closed
3/30/2010	5:14:27 PM	PH3 valve closed
3/30/2010	5:14:27 PM	SiCl4 pre valve closed
3/30/2010	5:14:27 PM	SiCl4 post valve closed
3/30/2010	5:14:27 PM	Main Vac valve closed
3/30/2010	5:14:27 PM	Bubbler valve closed
3/30/2010	5:14:27 PM	Bypass valve opened
3/30/2010	5:14:27 PM	Helium MFC set to  0.000000
3/30/2010	5:14:27 PM	H2 MFC set to  0.000000
3/30/2010	5:14:27 PM	BCl3 MFC set to  0.000000
3/30/2010	5:14:27 PM	SiCl4 MFC set to  0.000000
3/30/2010	5:14:27 PM	Bypass solenoid MFC set to  0.000000
3/30/2010	5:14:27 PM	Tube furnace set to 0
3/30/2010	5:14:59 PM	Helium valve closed
3/30/2010	5:14:59 PM	H2 valve closed
3/30/2010	5:14:59 PM	BCl3 valve closed
3/30/2010	5:14:59 PM	PH3 valve closed
3/30/2010	5:14:59 PM	SiCl4 pre valve closed
3/30/2010	5:14:59 PM	SiCl4 post valve closed
3/30/2010	5:14:59 PM	Bubbler valve closed
3/30/2010	5:14:59 PM	Main Vac valve opened
3/30/2010	5:14:59 PM	Bypass valve opened
3/30/2010	5:14:59 PM	Helium MFC set to  0.000000
3/30/2010	5:14:59 PM	H2 MFC set to  0.000000
3/30/2010	5:14:59 PM	BCl3 MFC set to  0.000000
3/30/2010	5:14:59 PM	SiCl4 MFC set to  0.000000
3/30/2010	5:14:59 PM	Bypass solenoid MFC set to  0.000000
3/30/2010	5:14:59 PM	Tube furnace set to 0
3/30/2010	5:15:00 PM	Run finished at 5:15 PM
3/30/2010	5:15:00 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/30/2010	5:15:48 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
3/30/2010	5:15:53 PM	Recipe started at 5:15 PM
3/30/2010	5:15:53 PM	H2 valve closed
3/30/2010	5:15:53 PM	BCl3 valve closed
3/30/2010	5:15:53 PM	PH3 valve closed
3/30/2010	5:15:53 PM	SiCl4 pre valve closed
3/30/2010	5:15:53 PM	SiCl4 post valve closed
3/30/2010	5:15:53 PM	Main Vac valve closed
3/30/2010	5:15:53 PM	Bypass valve closed
3/30/2010	5:15:53 PM	Bubbler valve closed
3/30/2010	5:15:53 PM	Helium valve opened
3/30/2010	5:15:53 PM	Helium MFC set to  500.000000
3/30/2010	5:15:53 PM	H2 MFC set to  0.000000
3/30/2010	5:15:53 PM	BCl3 MFC set to  0.000000
3/30/2010	5:15:53 PM	SiCl4 MFC set to  0.000000
3/30/2010	5:15:53 PM	Bypass solenoid MFC set to  0.000000
3/30/2010	5:15:54 PM	Tube furnace set to 0
3/30/2010	5:17:14 PM	Helium valve closed
3/30/2010	5:17:14 PM	H2 valve closed
3/30/2010	5:17:14 PM	BCl3 valve closed
3/30/2010	5:17:14 PM	PH3 valve closed
3/30/2010	5:17:14 PM	SiCl4 pre valve closed
3/30/2010	5:17:14 PM	SiCl4 post valve closed
3/30/2010	5:17:14 PM	Main Vac valve closed
3/30/2010	5:17:14 PM	Bypass valve closed
3/30/2010	5:17:14 PM	Bubbler valve closed
3/30/2010	5:17:14 PM	Helium MFC set to  0.000000
3/30/2010	5:17:14 PM	H2 MFC set to  0.000000
3/30/2010	5:17:14 PM	BCl3 MFC set to  0.000000
3/30/2010	5:17:14 PM	SiCl4 MFC set to  0.000000
3/30/2010	5:17:14 PM	Bypass solenoid MFC set to  0.000000
3/30/2010	5:17:14 PM	Tube furnace set to 0
3/30/2010	5:17:29 PM	Helium valve closed
3/30/2010	5:17:29 PM	H2 valve closed
3/30/2010	5:17:29 PM	BCl3 valve closed
3/30/2010	5:17:29 PM	PH3 valve closed
3/30/2010	5:17:29 PM	SiCl4 pre valve closed
3/30/2010	5:17:29 PM	SiCl4 post valve closed
3/30/2010	5:17:29 PM	Main Vac valve closed
3/30/2010	5:17:29 PM	Bubbler valve closed
3/30/2010	5:17:29 PM	Bypass valve opened
3/30/2010	5:17:29 PM	Helium MFC set to  0.000000
3/30/2010	5:17:29 PM	H2 MFC set to  0.000000
3/30/2010	5:17:29 PM	BCl3 MFC set to  0.000000
3/30/2010	5:17:29 PM	SiCl4 MFC set to  0.000000
3/30/2010	5:17:29 PM	Bypass solenoid MFC set to  0.000000
3/30/2010	5:17:29 PM	Tube furnace set to 0
3/30/2010	5:17:51 PM	Helium valve closed
3/30/2010	5:17:51 PM	H2 valve closed
3/30/2010	5:17:51 PM	BCl3 valve closed
3/30/2010	5:17:51 PM	PH3 valve closed
3/30/2010	5:17:51 PM	SiCl4 pre valve closed
3/30/2010	5:17:51 PM	SiCl4 post valve closed
3/30/2010	5:17:51 PM	Bubbler valve closed
3/30/2010	5:17:51 PM	Main Vac valve opened
3/30/2010	5:17:51 PM	Bypass valve opened
3/30/2010	5:17:51 PM	Helium MFC set to  0.000000
3/30/2010	5:17:51 PM	H2 MFC set to  0.000000
3/30/2010	5:17:51 PM	BCl3 MFC set to  0.000000
3/30/2010	5:17:51 PM	SiCl4 MFC set to  0.000000
3/30/2010	5:17:51 PM	Bypass solenoid MFC set to  0.000000
3/30/2010	5:17:52 PM	Tube furnace set to 0
3/30/2010	5:22:52 PM	H2 valve closed
3/30/2010	5:22:52 PM	BCl3 valve closed
3/30/2010	5:22:52 PM	PH3 valve closed
3/30/2010	5:22:52 PM	SiCl4 pre valve closed
3/30/2010	5:22:52 PM	SiCl4 post valve closed
3/30/2010	5:22:52 PM	Main Vac valve closed
3/30/2010	5:22:52 PM	Bypass valve closed
3/30/2010	5:22:52 PM	Bubbler valve closed
3/30/2010	5:22:52 PM	Helium valve opened
3/30/2010	5:22:52 PM	Helium MFC set to  500.000000
3/30/2010	5:22:52 PM	H2 MFC set to  0.000000
3/30/2010	5:22:52 PM	BCl3 MFC set to  0.000000
3/30/2010	5:22:52 PM	SiCl4 MFC set to  0.000000
3/30/2010	5:22:52 PM	Bypass solenoid MFC set to  0.000000
3/30/2010	5:22:52 PM	Tube furnace set to 0
3/30/2010	5:24:11 PM	Helium valve closed
3/30/2010	5:24:11 PM	H2 valve closed
3/30/2010	5:24:11 PM	BCl3 valve closed
3/30/2010	5:24:11 PM	PH3 valve closed
3/30/2010	5:24:11 PM	SiCl4 pre valve closed
3/30/2010	5:24:11 PM	SiCl4 post valve closed
3/30/2010	5:24:11 PM	Main Vac valve closed
3/30/2010	5:24:11 PM	Bypass valve closed
3/30/2010	5:24:11 PM	Bubbler valve closed
3/30/2010	5:24:11 PM	Helium MFC set to  0.000000
3/30/2010	5:24:11 PM	H2 MFC set to  0.000000
3/30/2010	5:24:11 PM	BCl3 MFC set to  0.000000
3/30/2010	5:24:11 PM	SiCl4 MFC set to  0.000000
3/30/2010	5:24:11 PM	Bypass solenoid MFC set to  0.000000
3/30/2010	5:24:11 PM	Tube furnace set to 0
3/30/2010	5:24:26 PM	Helium valve closed
3/30/2010	5:24:26 PM	H2 valve closed
3/30/2010	5:24:26 PM	BCl3 valve closed
3/30/2010	5:24:26 PM	PH3 valve closed
3/30/2010	5:24:26 PM	SiCl4 pre valve closed
3/30/2010	5:24:26 PM	SiCl4 post valve closed
3/30/2010	5:24:26 PM	Main Vac valve closed
3/30/2010	5:24:26 PM	Bubbler valve closed
3/30/2010	5:24:26 PM	Bypass valve opened
3/30/2010	5:24:26 PM	Helium MFC set to  0.000000
3/30/2010	5:24:26 PM	H2 MFC set to  0.000000
3/30/2010	5:24:26 PM	BCl3 MFC set to  0.000000
3/30/2010	5:24:26 PM	SiCl4 MFC set to  0.000000
3/30/2010	5:24:26 PM	Bypass solenoid MFC set to  0.000000
3/30/2010	5:24:27 PM	Tube furnace set to 0
3/30/2010	5:24:48 PM	Helium valve closed
3/30/2010	5:24:48 PM	H2 valve closed
3/30/2010	5:24:48 PM	BCl3 valve closed
3/30/2010	5:24:48 PM	PH3 valve closed
3/30/2010	5:24:48 PM	SiCl4 pre valve closed
3/30/2010	5:24:48 PM	SiCl4 post valve closed
3/30/2010	5:24:48 PM	Bubbler valve closed
3/30/2010	5:24:48 PM	Main Vac valve opened
3/30/2010	5:24:48 PM	Bypass valve opened
3/30/2010	5:24:48 PM	Helium MFC set to  0.000000
3/30/2010	5:24:48 PM	H2 MFC set to  0.000000
3/30/2010	5:24:48 PM	BCl3 MFC set to  0.000000
3/30/2010	5:24:48 PM	SiCl4 MFC set to  0.000000
3/30/2010	5:24:48 PM	Bypass solenoid MFC set to  0.000000
3/30/2010	5:24:48 PM	Tube furnace set to 0
3/30/2010	5:29:48 PM	H2 valve closed
3/30/2010	5:29:48 PM	BCl3 valve closed
3/30/2010	5:29:48 PM	PH3 valve closed
3/30/2010	5:29:48 PM	SiCl4 pre valve closed
3/30/2010	5:29:49 PM	SiCl4 post valve closed
3/30/2010	5:29:49 PM	Main Vac valve closed
3/30/2010	5:29:49 PM	Bypass valve closed
3/30/2010	5:29:49 PM	Bubbler valve closed
3/30/2010	5:29:49 PM	Helium valve opened
3/30/2010	5:29:49 PM	Helium MFC set to  500.000000
3/30/2010	5:29:49 PM	H2 MFC set to  0.000000
3/30/2010	5:29:49 PM	BCl3 MFC set to  0.000000
3/30/2010	5:29:49 PM	SiCl4 MFC set to  0.000000
3/30/2010	5:29:49 PM	Bypass solenoid MFC set to  0.000000
3/30/2010	5:29:49 PM	Tube furnace set to 0
3/30/2010	5:31:08 PM	Helium valve closed
3/30/2010	5:31:08 PM	H2 valve closed
3/30/2010	5:31:08 PM	BCl3 valve closed
3/30/2010	5:31:08 PM	PH3 valve closed
3/30/2010	5:31:08 PM	SiCl4 pre valve closed
3/30/2010	5:31:08 PM	SiCl4 post valve closed
3/30/2010	5:31:08 PM	Main Vac valve closed
3/30/2010	5:31:08 PM	Bypass valve closed
3/30/2010	5:31:08 PM	Bubbler valve closed
3/30/2010	5:31:08 PM	Helium MFC set to  0.000000
3/30/2010	5:31:08 PM	H2 MFC set to  0.000000
3/30/2010	5:31:08 PM	BCl3 MFC set to  0.000000
3/30/2010	5:31:08 PM	SiCl4 MFC set to  0.000000
3/30/2010	5:31:08 PM	Bypass solenoid MFC set to  0.000000
3/30/2010	5:31:08 PM	Tube furnace set to 0
3/30/2010	5:31:23 PM	Helium valve closed
3/30/2010	5:31:23 PM	H2 valve closed
3/30/2010	5:31:23 PM	BCl3 valve closed
3/30/2010	5:31:23 PM	PH3 valve closed
3/30/2010	5:31:23 PM	SiCl4 pre valve closed
3/30/2010	5:31:23 PM	SiCl4 post valve closed
3/30/2010	5:31:23 PM	Main Vac valve closed
3/30/2010	5:31:23 PM	Bubbler valve closed
3/30/2010	5:31:23 PM	Bypass valve opened
3/30/2010	5:31:23 PM	Helium MFC set to  0.000000
3/30/2010	5:31:23 PM	H2 MFC set to  0.000000
3/30/2010	5:31:23 PM	BCl3 MFC set to  0.000000
3/30/2010	5:31:23 PM	SiCl4 MFC set to  0.000000
3/30/2010	5:31:23 PM	Bypass solenoid MFC set to  0.000000
3/30/2010	5:31:23 PM	Tube furnace set to 0
3/30/2010	5:31:45 PM	Helium valve closed
3/30/2010	5:31:45 PM	H2 valve closed
3/30/2010	5:31:45 PM	BCl3 valve closed
3/30/2010	5:31:45 PM	PH3 valve closed
3/30/2010	5:31:45 PM	SiCl4 pre valve closed
3/30/2010	5:31:45 PM	SiCl4 post valve closed
3/30/2010	5:31:45 PM	Bubbler valve closed
3/30/2010	5:31:45 PM	Main Vac valve opened
3/30/2010	5:31:45 PM	Bypass valve opened
3/30/2010	5:31:45 PM	Helium MFC set to  0.000000
3/30/2010	5:31:45 PM	H2 MFC set to  0.000000
3/30/2010	5:31:45 PM	BCl3 MFC set to  0.000000
3/30/2010	5:31:45 PM	SiCl4 MFC set to  0.000000
3/30/2010	5:31:45 PM	Bypass solenoid MFC set to  0.000000
3/30/2010	5:31:45 PM	Tube furnace set to 0
3/30/2010	5:36:45 PM	Helium valve closed
3/30/2010	5:36:45 PM	H2 valve closed
3/30/2010	5:36:45 PM	BCl3 valve closed
3/30/2010	5:36:45 PM	PH3 valve closed
3/30/2010	5:36:45 PM	SiCl4 pre valve closed
3/30/2010	5:36:45 PM	SiCl4 post valve closed
3/30/2010	5:36:45 PM	Bubbler valve closed
3/30/2010	5:36:45 PM	Main Vac valve opened
3/30/2010	5:36:45 PM	Bypass valve opened
3/30/2010	5:36:45 PM	Helium MFC set to  0.000000
3/30/2010	5:36:45 PM	H2 MFC set to  0.000000
3/30/2010	5:36:45 PM	BCl3 MFC set to  0.000000
3/30/2010	5:36:45 PM	SiCl4 MFC set to  0.000000
3/30/2010	5:36:45 PM	Bypass solenoid MFC set to  0.000000
3/30/2010	5:36:45 PM	Tube furnace set to 0
3/30/2010	5:36:46 PM	Run finished at 5:36 PM
3/30/2010	5:36:46 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
3/30/2010	6:27:36 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
3/30/2010	6:27:36 PM	Recipe started at 6:27 PM
3/30/2010	6:27:36 PM	Helium valve closed
3/30/2010	6:27:36 PM	H2 valve closed
3/30/2010	6:27:37 PM	BCl3 valve closed
3/30/2010	6:27:37 PM	PH3 valve closed
3/30/2010	6:27:37 PM	SiCl4 pre valve closed
3/30/2010	6:27:37 PM	SiCl4 post valve closed
3/30/2010	6:27:37 PM	Main Vac valve closed
3/30/2010	6:27:37 PM	Bypass valve closed
3/30/2010	6:27:37 PM	Bubbler valve closed
3/30/2010	6:27:37 PM	Helium MFC set to  0.000000
3/30/2010	6:27:37 PM	H2 MFC set to  0.000000
3/30/2010	6:27:37 PM	BCl3 MFC set to  0.000000
3/30/2010	6:27:37 PM	SiCl4 MFC set to  0.000000
3/30/2010	6:27:37 PM	Bypass solenoid MFC set to  0.000000
3/30/2010	6:27:37 PM	Tube furnace set to 0
3/30/2010	6:27:37 PM	Run finished at 6:27 PM
3/30/2010	6:27:37 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
3/30/2010	6:28:20 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/30/2010	6:28:20 PM	Recipe started at 6:28 PM
3/30/2010	6:28:20 PM	Helium valve closed
3/30/2010	6:28:20 PM	H2 valve closed
3/30/2010	6:28:20 PM	BCl3 valve closed
3/30/2010	6:28:20 PM	PH3 valve closed
3/30/2010	6:28:20 PM	SiCl4 pre valve closed
3/30/2010	6:28:20 PM	SiCl4 post valve closed
3/30/2010	6:28:20 PM	Main Vac valve closed
3/30/2010	6:28:20 PM	Bubbler valve closed
3/30/2010	6:28:20 PM	Bypass valve opened
3/30/2010	6:28:20 PM	Helium MFC set to  0.000000
3/30/2010	6:28:21 PM	H2 MFC set to  0.000000
3/30/2010	6:28:21 PM	BCl3 MFC set to  0.000000
3/30/2010	6:28:21 PM	SiCl4 MFC set to  0.000000
3/30/2010	6:28:21 PM	Bypass solenoid MFC set to  0.000000
3/30/2010	6:28:21 PM	Tube furnace set to 0
3/30/2010	6:28:21 PM	Helium valve closed
3/30/2010	6:28:21 PM	H2 valve closed
3/30/2010	6:28:21 PM	BCl3 valve closed
3/30/2010	6:28:21 PM	PH3 valve closed
3/30/2010	6:28:21 PM	SiCl4 pre valve closed
3/30/2010	6:28:21 PM	SiCl4 post valve closed
3/30/2010	6:28:21 PM	Bubbler valve closed
3/30/2010	6:28:21 PM	Main Vac valve opened
3/30/2010	6:28:21 PM	Bypass valve opened
3/30/2010	6:28:21 PM	Helium MFC set to  0.000000
3/30/2010	6:28:21 PM	H2 MFC set to  0.000000
3/30/2010	6:28:21 PM	BCl3 MFC set to  0.000000
3/30/2010	6:28:21 PM	SiCl4 MFC set to  0.000000
3/30/2010	6:28:21 PM	Bypass solenoid MFC set to  0.000000
3/30/2010	6:28:21 PM	Tube furnace set to 0
3/30/2010	6:28:21 PM	Run finished at 6:28 PM
3/30/2010	6:28:21 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/30/2010	6:34:59 PM	Recipe started at 6:34 PM
3/30/2010	6:34:59 PM	Helium valve closed
3/30/2010	6:34:59 PM	BCl3 valve closed
3/30/2010	6:34:59 PM	PH3 valve closed
3/30/2010	6:34:59 PM	SiCl4 pre valve closed
3/30/2010	6:34:59 PM	SiCl4 post valve closed
3/30/2010	6:34:59 PM	Main Vac valve closed
3/30/2010	6:34:59 PM	Bypass valve closed
3/30/2010	6:34:59 PM	Bubbler valve closed
3/30/2010	6:34:59 PM	H2 valve opened
3/30/2010	6:34:59 PM	Helium MFC set to  0.000000
3/30/2010	6:34:59 PM	H2 MFC set to  500.000000
3/30/2010	6:34:59 PM	BCl3 MFC set to  0.000000
3/30/2010	6:34:59 PM	SiCl4 MFC set to  0.000000
3/30/2010	6:34:59 PM	Bypass solenoid MFC set to  0.000000
3/30/2010	6:34:59 PM	Tube furnace set to 0
3/30/2010	6:36:19 PM	Helium valve closed
3/30/2010	6:36:19 PM	BCl3 valve closed
3/30/2010	6:36:19 PM	PH3 valve closed
3/30/2010	6:36:19 PM	SiCl4 pre valve closed
3/30/2010	6:36:19 PM	SiCl4 post valve closed
3/30/2010	6:36:19 PM	Main Vac valve closed
3/30/2010	6:36:19 PM	Bypass valve closed
3/30/2010	6:36:19 PM	H2 valve opened
3/30/2010	6:36:19 PM	Bubbler valve opened
3/30/2010	6:36:19 PM	Helium MFC set to  0.000000
3/30/2010	6:36:19 PM	H2 MFC set to  500.000000
3/30/2010	6:36:19 PM	BCl3 MFC set to  0.000000
3/30/2010	6:36:19 PM	SiCl4 MFC set to  0.000000
3/30/2010	6:36:19 PM	Bypass solenoid MFC set to  0.000000
3/30/2010	6:36:20 PM	Tube furnace set to 1000
3/30/2010	6:56:20 PM	Helium valve closed
3/30/2010	6:56:20 PM	BCl3 valve closed
3/30/2010	6:56:20 PM	PH3 valve closed
3/30/2010	6:56:20 PM	Main Vac valve closed
3/30/2010	6:56:20 PM	Bypass valve closed
3/30/2010	6:56:20 PM	H2 valve opened
3/30/2010	6:56:20 PM	SiCl4 pre valve opened
3/30/2010	6:56:20 PM	SiCl4 post valve opened
3/30/2010	6:56:20 PM	Bubbler valve opened
3/30/2010	6:56:20 PM	Helium MFC set to  0.000000
3/30/2010	6:56:20 PM	H2 MFC set to  500.000000
3/30/2010	6:56:20 PM	BCl3 MFC set to  0.000000
3/30/2010	6:56:20 PM	SiCl4 MFC set to  300.000000
3/30/2010	6:56:20 PM	Bypass solenoid MFC set to  0.000000
3/30/2010	6:56:20 PM	Tube furnace set to 1000
3/30/2010	7:26:20 PM	H2 valve closed
3/30/2010	7:26:20 PM	BCl3 valve closed
3/30/2010	7:26:20 PM	PH3 valve closed
3/30/2010	7:26:20 PM	SiCl4 pre valve closed
3/30/2010	7:26:20 PM	SiCl4 post valve closed
3/30/2010	7:26:20 PM	Main Vac valve closed
3/30/2010	7:26:20 PM	Bypass valve closed
3/30/2010	7:26:20 PM	Helium valve opened
3/30/2010	7:26:20 PM	Bubbler valve opened
3/30/2010	7:26:20 PM	Helium MFC set to  500.000000
3/30/2010	7:26:20 PM	H2 MFC set to  0.000000
3/30/2010	7:26:20 PM	BCl3 MFC set to  0.000000
3/30/2010	7:26:20 PM	SiCl4 MFC set to  0.000000
3/30/2010	7:26:20 PM	Bypass solenoid MFC set to  0.000000
3/30/2010	7:26:20 PM	Tube furnace set to 750
3/30/2010	7:46:20 PM	H2 valve closed
3/30/2010	7:46:20 PM	BCl3 valve closed
3/30/2010	7:46:20 PM	PH3 valve closed
3/30/2010	7:46:20 PM	SiCl4 pre valve closed
3/30/2010	7:46:20 PM	SiCl4 post valve closed
3/30/2010	7:46:20 PM	Main Vac valve closed
3/30/2010	7:46:20 PM	Bypass valve closed
3/30/2010	7:46:20 PM	Helium valve opened
3/30/2010	7:46:20 PM	Bubbler valve opened
3/30/2010	7:46:20 PM	Helium MFC set to  500.000000
3/30/2010	7:46:20 PM	H2 MFC set to  0.000000
3/30/2010	7:46:20 PM	BCl3 MFC set to  0.000000
3/30/2010	7:46:20 PM	SiCl4 MFC set to  0.000000
3/30/2010	7:46:20 PM	Bypass solenoid MFC set to  0.000000
3/30/2010	7:46:20 PM	Tube furnace set to 0
3/30/2010	8:06:20 PM	Helium valve closed
3/30/2010	8:06:20 PM	H2 valve closed
3/30/2010	8:06:20 PM	BCl3 valve closed
3/30/2010	8:06:20 PM	PH3 valve closed
3/30/2010	8:06:20 PM	SiCl4 pre valve closed
3/30/2010	8:06:20 PM	SiCl4 post valve closed
3/30/2010	8:06:20 PM	Main Vac valve closed
3/30/2010	8:06:20 PM	Bypass valve closed
3/30/2010	8:06:20 PM	Bubbler valve closed
3/30/2010	8:06:20 PM	Helium MFC set to  0.000000
3/30/2010	8:06:20 PM	H2 MFC set to  0.000000
3/30/2010	8:06:20 PM	BCl3 MFC set to  0.000000
3/30/2010	8:06:20 PM	SiCl4 MFC set to  0.000000
3/30/2010	8:06:20 PM	Bypass solenoid MFC set to  0.000000
3/30/2010	8:06:20 PM	Tube furnace set to 0
3/30/2010	8:06:20 PM	Run finished at 8:06 PM
3/30/2010	8:38:05 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/30/2010	8:38:05 PM	Recipe started at 8:38 PM
3/30/2010	8:38:05 PM	H2 valve closed
3/30/2010	8:38:05 PM	BCl3 valve closed
3/30/2010	8:38:05 PM	PH3 valve closed
3/30/2010	8:38:05 PM	SiCl4 pre valve closed
3/30/2010	8:38:05 PM	SiCl4 post valve closed
3/30/2010	8:38:05 PM	Main Vac valve closed
3/30/2010	8:38:05 PM	Bypass valve closed
3/30/2010	8:38:05 PM	Bubbler valve closed
3/30/2010	8:38:05 PM	Helium valve opened
3/30/2010	8:38:05 PM	Helium MFC set to  500.000000
3/30/2010	8:38:05 PM	H2 MFC set to  0.000000
3/30/2010	8:38:05 PM	BCl3 MFC set to  0.000000
3/30/2010	8:38:05 PM	SiCl4 MFC set to  0.000000
3/30/2010	8:38:05 PM	Bypass solenoid MFC set to  0.000000
3/30/2010	8:38:05 PM	Tube furnace set to 0
3/30/2010	8:38:06 PM	Helium valve closed
3/30/2010	8:38:06 PM	H2 valve closed
3/30/2010	8:38:06 PM	BCl3 valve closed
3/30/2010	8:38:06 PM	PH3 valve closed
3/30/2010	8:38:06 PM	SiCl4 pre valve closed
3/30/2010	8:38:07 PM	SiCl4 post valve closed
3/30/2010	8:38:07 PM	Main Vac valve closed
3/30/2010	8:38:07 PM	Bypass valve closed
3/30/2010	8:38:07 PM	Bubbler valve closed
3/30/2010	8:38:07 PM	Helium MFC set to  0.000000
3/30/2010	8:38:07 PM	H2 MFC set to  0.000000
3/30/2010	8:38:07 PM	BCl3 MFC set to  0.000000
3/30/2010	8:38:07 PM	SiCl4 MFC set to  0.000000
3/30/2010	8:38:07 PM	Bypass solenoid MFC set to  0.000000
3/30/2010	8:38:07 PM	Tube furnace set to 0
3/30/2010	8:38:07 PM	Run finished at 8:38 PM
3/30/2010	8:38:07 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/30/2010	8:50:10 PM	Helium valve opened
3/30/2010	8:50:11 PM	Helium valve closed
3/30/2010	9:16:39 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/30/2010	9:16:40 PM	Recipe started at 9:16 PM
3/30/2010	9:16:40 PM	Helium valve closed
3/30/2010	9:16:40 PM	H2 valve closed
3/30/2010	9:16:40 PM	BCl3 valve closed
3/30/2010	9:16:40 PM	PH3 valve closed
3/30/2010	9:16:40 PM	SiCl4 pre valve closed
3/30/2010	9:16:40 PM	SiCl4 post valve closed
3/30/2010	9:16:40 PM	Main Vac valve closed
3/30/2010	9:16:40 PM	Bubbler valve closed
3/30/2010	9:16:40 PM	Bypass valve opened
3/30/2010	9:16:40 PM	Helium MFC set to  0.000000
3/30/2010	9:16:40 PM	H2 MFC set to  0.000000
3/30/2010	9:16:40 PM	BCl3 MFC set to  0.000000
3/30/2010	9:16:40 PM	SiCl4 MFC set to  0.000000
3/30/2010	9:16:40 PM	Bypass solenoid MFC set to  0.000000
3/30/2010	9:16:40 PM	Tube furnace set to 0
3/30/2010	9:17:13 PM	Helium valve closed
3/30/2010	9:17:13 PM	H2 valve closed
3/30/2010	9:17:13 PM	BCl3 valve closed
3/30/2010	9:17:13 PM	PH3 valve closed
3/30/2010	9:17:13 PM	SiCl4 pre valve closed
3/30/2010	9:17:13 PM	SiCl4 post valve closed
3/30/2010	9:17:13 PM	Bubbler valve closed
3/30/2010	9:17:13 PM	Main Vac valve opened
3/30/2010	9:17:13 PM	Bypass valve opened
3/30/2010	9:17:13 PM	Helium MFC set to  0.000000
3/30/2010	9:17:13 PM	H2 MFC set to  0.000000
3/30/2010	9:17:13 PM	BCl3 MFC set to  0.000000
3/30/2010	9:17:13 PM	SiCl4 MFC set to  0.000000
3/30/2010	9:17:13 PM	Bypass solenoid MFC set to  0.000000
3/30/2010	9:17:13 PM	Tube furnace set to 0
3/30/2010	9:17:14 PM	Run finished at 9:17 PM
3/30/2010	9:17:14 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/30/2010	9:17:57 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
3/30/2010	9:18:03 PM	Recipe started at 9:18 PM
3/30/2010	9:18:03 PM	H2 valve closed
3/30/2010	9:18:03 PM	BCl3 valve closed
3/30/2010	9:18:03 PM	PH3 valve closed
3/30/2010	9:18:03 PM	SiCl4 pre valve closed
3/30/2010	9:18:03 PM	SiCl4 post valve closed
3/30/2010	9:18:03 PM	Main Vac valve closed
3/30/2010	9:18:03 PM	Bypass valve closed
3/30/2010	9:18:03 PM	Bubbler valve closed
3/30/2010	9:18:03 PM	Helium valve opened
3/30/2010	9:18:03 PM	Helium MFC set to  500.000000
3/30/2010	9:18:03 PM	H2 MFC set to  0.000000
3/30/2010	9:18:03 PM	BCl3 MFC set to  0.000000
3/30/2010	9:18:03 PM	SiCl4 MFC set to  0.000000
3/30/2010	9:18:03 PM	Bypass solenoid MFC set to  0.000000
3/30/2010	9:18:03 PM	Tube furnace set to 0
3/30/2010	9:19:25 PM	Helium valve closed
3/30/2010	9:19:25 PM	H2 valve closed
3/30/2010	9:19:25 PM	BCl3 valve closed
3/30/2010	9:19:25 PM	PH3 valve closed
3/30/2010	9:19:25 PM	SiCl4 pre valve closed
3/30/2010	9:19:25 PM	SiCl4 post valve closed
3/30/2010	9:19:25 PM	Main Vac valve closed
3/30/2010	9:19:25 PM	Bypass valve closed
3/30/2010	9:19:25 PM	Bubbler valve closed
3/30/2010	9:19:25 PM	Helium MFC set to  0.000000
3/30/2010	9:19:25 PM	H2 MFC set to  0.000000
3/30/2010	9:19:25 PM	BCl3 MFC set to  0.000000
3/30/2010	9:19:25 PM	SiCl4 MFC set to  0.000000
3/30/2010	9:19:25 PM	Bypass solenoid MFC set to  0.000000
3/30/2010	9:19:25 PM	Tube furnace set to 0
3/30/2010	9:19:40 PM	Helium valve closed
3/30/2010	9:19:40 PM	H2 valve closed
3/30/2010	9:19:40 PM	BCl3 valve closed
3/30/2010	9:19:40 PM	PH3 valve closed
3/30/2010	9:19:40 PM	SiCl4 pre valve closed
3/30/2010	9:19:40 PM	SiCl4 post valve closed
3/30/2010	9:19:40 PM	Main Vac valve closed
3/30/2010	9:19:40 PM	Bubbler valve closed
3/30/2010	9:19:40 PM	Bypass valve opened
3/30/2010	9:19:40 PM	Helium MFC set to  0.000000
3/30/2010	9:19:40 PM	H2 MFC set to  0.000000
3/30/2010	9:19:40 PM	BCl3 MFC set to  0.000000
3/30/2010	9:19:40 PM	SiCl4 MFC set to  0.000000
3/30/2010	9:19:40 PM	Bypass solenoid MFC set to  0.000000
3/30/2010	9:19:40 PM	Tube furnace set to 0
3/30/2010	9:20:02 PM	Helium valve closed
3/30/2010	9:20:02 PM	H2 valve closed
3/30/2010	9:20:02 PM	BCl3 valve closed
3/30/2010	9:20:02 PM	PH3 valve closed
3/30/2010	9:20:02 PM	SiCl4 pre valve closed
3/30/2010	9:20:02 PM	SiCl4 post valve closed
3/30/2010	9:20:02 PM	Bubbler valve closed
3/30/2010	9:20:02 PM	Main Vac valve opened
3/30/2010	9:20:02 PM	Bypass valve opened
3/30/2010	9:20:02 PM	Helium MFC set to  0.000000
3/30/2010	9:20:02 PM	H2 MFC set to  0.000000
3/30/2010	9:20:02 PM	BCl3 MFC set to  0.000000
3/30/2010	9:20:02 PM	SiCl4 MFC set to  0.000000
3/30/2010	9:20:02 PM	Bypass solenoid MFC set to  0.000000
3/30/2010	9:20:03 PM	Tube furnace set to 0
3/30/2010	9:25:03 PM	H2 valve closed
3/30/2010	9:25:03 PM	BCl3 valve closed
3/30/2010	9:25:03 PM	PH3 valve closed
3/30/2010	9:25:03 PM	SiCl4 pre valve closed
3/30/2010	9:25:03 PM	SiCl4 post valve closed
3/30/2010	9:25:03 PM	Main Vac valve closed
3/30/2010	9:25:03 PM	Bypass valve closed
3/30/2010	9:25:03 PM	Bubbler valve closed
3/30/2010	9:25:03 PM	Helium valve opened
3/30/2010	9:25:03 PM	Helium MFC set to  500.000000
3/30/2010	9:25:03 PM	H2 MFC set to  0.000000
3/30/2010	9:25:03 PM	BCl3 MFC set to  0.000000
3/30/2010	9:25:03 PM	SiCl4 MFC set to  0.000000
3/30/2010	9:25:03 PM	Bypass solenoid MFC set to  0.000000
3/30/2010	9:25:03 PM	Tube furnace set to 0
3/30/2010	9:26:25 PM	Helium valve closed
3/30/2010	9:26:25 PM	H2 valve closed
3/30/2010	9:26:25 PM	BCl3 valve closed
3/30/2010	9:26:25 PM	PH3 valve closed
3/30/2010	9:26:25 PM	SiCl4 pre valve closed
3/30/2010	9:26:25 PM	SiCl4 post valve closed
3/30/2010	9:26:25 PM	Main Vac valve closed
3/30/2010	9:26:25 PM	Bypass valve closed
3/30/2010	9:26:25 PM	Bubbler valve closed
3/30/2010	9:26:25 PM	Helium MFC set to  0.000000
3/30/2010	9:26:25 PM	H2 MFC set to  0.000000
3/30/2010	9:26:25 PM	BCl3 MFC set to  0.000000
3/30/2010	9:26:25 PM	SiCl4 MFC set to  0.000000
3/30/2010	9:26:25 PM	Bypass solenoid MFC set to  0.000000
3/30/2010	9:26:25 PM	Tube furnace set to 0
3/30/2010	9:26:40 PM	Helium valve closed
3/30/2010	9:26:40 PM	H2 valve closed
3/30/2010	9:26:40 PM	BCl3 valve closed
3/30/2010	9:26:40 PM	PH3 valve closed
3/30/2010	9:26:40 PM	SiCl4 pre valve closed
3/30/2010	9:26:40 PM	SiCl4 post valve closed
3/30/2010	9:26:40 PM	Main Vac valve closed
3/30/2010	9:26:40 PM	Bubbler valve closed
3/30/2010	9:26:40 PM	Bypass valve opened
3/30/2010	9:26:40 PM	Helium MFC set to  0.000000
3/30/2010	9:26:40 PM	H2 MFC set to  0.000000
3/30/2010	9:26:40 PM	BCl3 MFC set to  0.000000
3/30/2010	9:26:40 PM	SiCl4 MFC set to  0.000000
3/30/2010	9:26:40 PM	Bypass solenoid MFC set to  0.000000
3/30/2010	9:26:40 PM	Tube furnace set to 0
3/30/2010	9:27:02 PM	Helium valve closed
3/30/2010	9:27:02 PM	H2 valve closed
3/30/2010	9:27:02 PM	BCl3 valve closed
3/30/2010	9:27:02 PM	PH3 valve closed
3/30/2010	9:27:02 PM	SiCl4 pre valve closed
3/30/2010	9:27:02 PM	SiCl4 post valve closed
3/30/2010	9:27:02 PM	Bubbler valve closed
3/30/2010	9:27:02 PM	Main Vac valve opened
3/30/2010	9:27:02 PM	Bypass valve opened
3/30/2010	9:27:02 PM	Helium MFC set to  0.000000
3/30/2010	9:27:02 PM	H2 MFC set to  0.000000
3/30/2010	9:27:02 PM	BCl3 MFC set to  0.000000
3/30/2010	9:27:02 PM	SiCl4 MFC set to  0.000000
3/30/2010	9:27:02 PM	Bypass solenoid MFC set to  0.000000
3/30/2010	9:27:03 PM	Tube furnace set to 0
3/30/2010	9:32:03 PM	H2 valve closed
3/30/2010	9:32:03 PM	BCl3 valve closed
3/30/2010	9:32:03 PM	PH3 valve closed
3/30/2010	9:32:03 PM	SiCl4 pre valve closed
3/30/2010	9:32:03 PM	SiCl4 post valve closed
3/30/2010	9:32:03 PM	Main Vac valve closed
3/30/2010	9:32:03 PM	Bypass valve closed
3/30/2010	9:32:03 PM	Bubbler valve closed
3/30/2010	9:32:03 PM	Helium valve opened
3/30/2010	9:32:03 PM	Helium MFC set to  500.000000
3/30/2010	9:32:03 PM	H2 MFC set to  0.000000
3/30/2010	9:32:03 PM	BCl3 MFC set to  0.000000
3/30/2010	9:32:03 PM	SiCl4 MFC set to  0.000000
3/30/2010	9:32:03 PM	Bypass solenoid MFC set to  0.000000
3/30/2010	9:32:03 PM	Tube furnace set to 0
3/30/2010	9:33:25 PM	Helium valve closed
3/30/2010	9:33:25 PM	H2 valve closed
3/30/2010	9:33:25 PM	BCl3 valve closed
3/30/2010	9:33:25 PM	PH3 valve closed
3/30/2010	9:33:25 PM	SiCl4 pre valve closed
3/30/2010	9:33:25 PM	SiCl4 post valve closed
3/30/2010	9:33:25 PM	Main Vac valve closed
3/30/2010	9:33:25 PM	Bypass valve closed
3/30/2010	9:33:25 PM	Bubbler valve closed
3/30/2010	9:33:25 PM	Helium MFC set to  0.000000
3/30/2010	9:33:25 PM	H2 MFC set to  0.000000
3/30/2010	9:33:25 PM	BCl3 MFC set to  0.000000
3/30/2010	9:33:25 PM	SiCl4 MFC set to  0.000000
3/30/2010	9:33:25 PM	Bypass solenoid MFC set to  0.000000
3/30/2010	9:33:25 PM	Tube furnace set to 0
3/30/2010	9:33:40 PM	Helium valve closed
3/30/2010	9:33:40 PM	H2 valve closed
3/30/2010	9:33:40 PM	BCl3 valve closed
3/30/2010	9:33:40 PM	PH3 valve closed
3/30/2010	9:33:40 PM	SiCl4 pre valve closed
3/30/2010	9:33:40 PM	SiCl4 post valve closed
3/30/2010	9:33:40 PM	Main Vac valve closed
3/30/2010	9:33:40 PM	Bubbler valve closed
3/30/2010	9:33:40 PM	Bypass valve opened
3/30/2010	9:33:40 PM	Helium MFC set to  0.000000
3/30/2010	9:33:40 PM	H2 MFC set to  0.000000
3/30/2010	9:33:40 PM	BCl3 MFC set to  0.000000
3/30/2010	9:33:40 PM	SiCl4 MFC set to  0.000000
3/30/2010	9:33:40 PM	Bypass solenoid MFC set to  0.000000
3/30/2010	9:33:40 PM	Tube furnace set to 0
3/30/2010	9:34:02 PM	Helium valve closed
3/30/2010	9:34:02 PM	H2 valve closed
3/30/2010	9:34:02 PM	BCl3 valve closed
3/30/2010	9:34:02 PM	PH3 valve closed
3/30/2010	9:34:02 PM	SiCl4 pre valve closed
3/30/2010	9:34:02 PM	SiCl4 post valve closed
3/30/2010	9:34:02 PM	Bubbler valve closed
3/30/2010	9:34:02 PM	Main Vac valve opened
3/30/2010	9:34:02 PM	Bypass valve opened
3/30/2010	9:34:02 PM	Helium MFC set to  0.000000
3/30/2010	9:34:02 PM	H2 MFC set to  0.000000
3/30/2010	9:34:02 PM	BCl3 MFC set to  0.000000
3/30/2010	9:34:02 PM	SiCl4 MFC set to  0.000000
3/30/2010	9:34:02 PM	Bypass solenoid MFC set to  0.000000
3/30/2010	9:34:03 PM	Tube furnace set to 0
3/30/2010	9:39:03 PM	Helium valve closed
3/30/2010	9:39:03 PM	H2 valve closed
3/30/2010	9:39:03 PM	BCl3 valve closed
3/30/2010	9:39:03 PM	PH3 valve closed
3/30/2010	9:39:03 PM	SiCl4 pre valve closed
3/30/2010	9:39:03 PM	SiCl4 post valve closed
3/30/2010	9:39:03 PM	Bubbler valve closed
3/30/2010	9:39:03 PM	Main Vac valve opened
3/30/2010	9:39:03 PM	Bypass valve opened
3/30/2010	9:39:03 PM	Helium MFC set to  0.000000
3/30/2010	9:39:03 PM	H2 MFC set to  0.000000
3/30/2010	9:39:03 PM	BCl3 MFC set to  0.000000
3/30/2010	9:39:03 PM	SiCl4 MFC set to  0.000000
3/30/2010	9:39:03 PM	Bypass solenoid MFC set to  0.000000
3/30/2010	9:39:03 PM	Tube furnace set to 0
3/30/2010	9:39:04 PM	Run finished at 9:39 PM
3/30/2010	9:39:04 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
3/30/2010	9:41:17 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
3/30/2010	9:41:23 PM	Recipe started at 9:41 PM
3/30/2010	9:41:23 PM	H2 valve closed
3/30/2010	9:41:23 PM	BCl3 valve closed
3/30/2010	9:41:23 PM	PH3 valve closed
3/30/2010	9:41:23 PM	SiCl4 pre valve closed
3/30/2010	9:41:23 PM	SiCl4 post valve closed
3/30/2010	9:41:23 PM	Main Vac valve closed
3/30/2010	9:41:23 PM	Bypass valve closed
3/30/2010	9:41:23 PM	Bubbler valve closed
3/30/2010	9:41:23 PM	Helium valve opened
3/30/2010	9:41:23 PM	Helium MFC set to  500.000000
3/30/2010	9:41:23 PM	H2 MFC set to  0.000000
3/30/2010	9:41:23 PM	BCl3 MFC set to  0.000000
3/30/2010	9:41:23 PM	SiCl4 MFC set to  0.000000
3/30/2010	9:41:23 PM	Bypass solenoid MFC set to  0.000000
3/30/2010	9:41:23 PM	Tube furnace set to 0
3/30/2010	9:42:45 PM	Helium valve closed
3/30/2010	9:42:45 PM	H2 valve closed
3/30/2010	9:42:45 PM	BCl3 valve closed
3/30/2010	9:42:45 PM	PH3 valve closed
3/30/2010	9:42:45 PM	SiCl4 pre valve closed
3/30/2010	9:42:45 PM	SiCl4 post valve closed
3/30/2010	9:42:45 PM	Main Vac valve closed
3/30/2010	9:42:45 PM	Bypass valve closed
3/30/2010	9:42:45 PM	Bubbler valve closed
3/30/2010	9:42:45 PM	Helium MFC set to  0.000000
3/30/2010	9:42:45 PM	H2 MFC set to  0.000000
3/30/2010	9:42:45 PM	BCl3 MFC set to  0.000000
3/30/2010	9:42:45 PM	SiCl4 MFC set to  0.000000
3/30/2010	9:42:45 PM	Bypass solenoid MFC set to  0.000000
3/30/2010	9:42:45 PM	Tube furnace set to 0
3/30/2010	9:43:00 PM	Helium valve closed
3/30/2010	9:43:00 PM	H2 valve closed
3/30/2010	9:43:00 PM	BCl3 valve closed
3/30/2010	9:43:00 PM	PH3 valve closed
3/30/2010	9:43:00 PM	SiCl4 pre valve closed
3/30/2010	9:43:00 PM	SiCl4 post valve closed
3/30/2010	9:43:00 PM	Main Vac valve closed
3/30/2010	9:43:00 PM	Bubbler valve closed
3/30/2010	9:43:00 PM	Bypass valve opened
3/30/2010	9:43:00 PM	Helium MFC set to  0.000000
3/30/2010	9:43:00 PM	H2 MFC set to  0.000000
3/30/2010	9:43:00 PM	BCl3 MFC set to  0.000000
3/30/2010	9:43:00 PM	SiCl4 MFC set to  0.000000
3/30/2010	9:43:00 PM	Bypass solenoid MFC set to  0.000000
3/30/2010	9:43:00 PM	Tube furnace set to 0
3/30/2010	9:43:23 PM	Helium valve closed
3/30/2010	9:43:23 PM	H2 valve closed
3/30/2010	9:43:23 PM	BCl3 valve closed
3/30/2010	9:43:23 PM	PH3 valve closed
3/30/2010	9:43:23 PM	SiCl4 pre valve closed
3/30/2010	9:43:23 PM	SiCl4 post valve closed
3/30/2010	9:43:23 PM	Bubbler valve closed
3/30/2010	9:43:23 PM	Main Vac valve opened
3/30/2010	9:43:23 PM	Bypass valve opened
3/30/2010	9:43:23 PM	Helium MFC set to  0.000000
3/30/2010	9:43:23 PM	H2 MFC set to  0.000000
3/30/2010	9:43:23 PM	BCl3 MFC set to  0.000000
3/30/2010	9:43:23 PM	SiCl4 MFC set to  0.000000
3/30/2010	9:43:23 PM	Bypass solenoid MFC set to  0.000000
3/30/2010	9:43:23 PM	Tube furnace set to 0
3/30/2010	9:48:23 PM	H2 valve closed
3/30/2010	9:48:23 PM	BCl3 valve closed
3/30/2010	9:48:23 PM	PH3 valve closed
3/30/2010	9:48:23 PM	SiCl4 pre valve closed
3/30/2010	9:48:23 PM	SiCl4 post valve closed
3/30/2010	9:48:23 PM	Main Vac valve closed
3/30/2010	9:48:23 PM	Bypass valve closed
3/30/2010	9:48:23 PM	Bubbler valve closed
3/30/2010	9:48:23 PM	Helium valve opened
3/30/2010	9:48:23 PM	Helium MFC set to  500.000000
3/30/2010	9:48:23 PM	H2 MFC set to  0.000000
3/30/2010	9:48:23 PM	BCl3 MFC set to  0.000000
3/30/2010	9:48:23 PM	SiCl4 MFC set to  0.000000
3/30/2010	9:48:23 PM	Bypass solenoid MFC set to  0.000000
3/30/2010	9:48:23 PM	Tube furnace set to 0
3/30/2010	9:49:45 PM	Helium valve closed
3/30/2010	9:49:45 PM	H2 valve closed
3/30/2010	9:49:45 PM	BCl3 valve closed
3/30/2010	9:49:45 PM	PH3 valve closed
3/30/2010	9:49:45 PM	SiCl4 pre valve closed
3/30/2010	9:49:45 PM	SiCl4 post valve closed
3/30/2010	9:49:45 PM	Main Vac valve closed
3/30/2010	9:49:45 PM	Bypass valve closed
3/30/2010	9:49:45 PM	Bubbler valve closed
3/30/2010	9:49:45 PM	Helium MFC set to  0.000000
3/30/2010	9:49:45 PM	H2 MFC set to  0.000000
3/30/2010	9:49:45 PM	BCl3 MFC set to  0.000000
3/30/2010	9:49:45 PM	SiCl4 MFC set to  0.000000
3/30/2010	9:49:45 PM	Bypass solenoid MFC set to  0.000000
3/30/2010	9:49:45 PM	Tube furnace set to 0
3/30/2010	9:50:00 PM	Helium valve closed
3/30/2010	9:50:00 PM	H2 valve closed
3/30/2010	9:50:00 PM	BCl3 valve closed
3/30/2010	9:50:00 PM	PH3 valve closed
3/30/2010	9:50:00 PM	SiCl4 pre valve closed
3/30/2010	9:50:00 PM	SiCl4 post valve closed
3/30/2010	9:50:00 PM	Main Vac valve closed
3/30/2010	9:50:00 PM	Bubbler valve closed
3/30/2010	9:50:00 PM	Bypass valve opened
3/30/2010	9:50:00 PM	Helium MFC set to  0.000000
3/30/2010	9:50:00 PM	H2 MFC set to  0.000000
3/30/2010	9:50:00 PM	BCl3 MFC set to  0.000000
3/30/2010	9:50:00 PM	SiCl4 MFC set to  0.000000
3/30/2010	9:50:00 PM	Bypass solenoid MFC set to  0.000000
3/30/2010	9:50:01 PM	Tube furnace set to 0
3/30/2010	9:50:23 PM	Helium valve closed
3/30/2010	9:50:23 PM	H2 valve closed
3/30/2010	9:50:23 PM	BCl3 valve closed
3/30/2010	9:50:23 PM	PH3 valve closed
3/30/2010	9:50:23 PM	SiCl4 pre valve closed
3/30/2010	9:50:23 PM	SiCl4 post valve closed
3/30/2010	9:50:23 PM	Bubbler valve closed
3/30/2010	9:50:23 PM	Main Vac valve opened
3/30/2010	9:50:23 PM	Bypass valve opened
3/30/2010	9:50:23 PM	Helium MFC set to  0.000000
3/30/2010	9:50:23 PM	H2 MFC set to  0.000000
3/30/2010	9:50:23 PM	BCl3 MFC set to  0.000000
3/30/2010	9:50:23 PM	SiCl4 MFC set to  0.000000
3/30/2010	9:50:23 PM	Bypass solenoid MFC set to  0.000000
3/30/2010	9:50:23 PM	Tube furnace set to 0
3/30/2010	9:55:23 PM	H2 valve closed
3/30/2010	9:55:23 PM	BCl3 valve closed
3/30/2010	9:55:23 PM	PH3 valve closed
3/30/2010	9:55:23 PM	SiCl4 pre valve closed
3/30/2010	9:55:23 PM	SiCl4 post valve closed
3/30/2010	9:55:23 PM	Main Vac valve closed
3/30/2010	9:55:23 PM	Bypass valve closed
3/30/2010	9:55:23 PM	Bubbler valve closed
3/30/2010	9:55:23 PM	Helium valve opened
3/30/2010	9:55:23 PM	Helium MFC set to  500.000000
3/30/2010	9:55:23 PM	H2 MFC set to  0.000000
3/30/2010	9:55:23 PM	BCl3 MFC set to  0.000000
3/30/2010	9:55:23 PM	SiCl4 MFC set to  0.000000
3/30/2010	9:55:23 PM	Bypass solenoid MFC set to  0.000000
3/30/2010	9:55:23 PM	Tube furnace set to 0
3/30/2010	9:56:45 PM	Helium valve closed
3/30/2010	9:56:45 PM	H2 valve closed
3/30/2010	9:56:45 PM	BCl3 valve closed
3/30/2010	9:56:45 PM	PH3 valve closed
3/30/2010	9:56:45 PM	SiCl4 pre valve closed
3/30/2010	9:56:45 PM	SiCl4 post valve closed
3/30/2010	9:56:45 PM	Main Vac valve closed
3/30/2010	9:56:45 PM	Bypass valve closed
3/30/2010	9:56:45 PM	Bubbler valve closed
3/30/2010	9:56:45 PM	Helium MFC set to  0.000000
3/30/2010	9:56:45 PM	H2 MFC set to  0.000000
3/30/2010	9:56:45 PM	BCl3 MFC set to  0.000000
3/30/2010	9:56:45 PM	SiCl4 MFC set to  0.000000
3/30/2010	9:56:45 PM	Bypass solenoid MFC set to  0.000000
3/30/2010	9:56:46 PM	Tube furnace set to 0
3/30/2010	9:57:01 PM	Helium valve closed
3/30/2010	9:57:01 PM	H2 valve closed
3/30/2010	9:57:01 PM	BCl3 valve closed
3/30/2010	9:57:01 PM	PH3 valve closed
3/30/2010	9:57:01 PM	SiCl4 pre valve closed
3/30/2010	9:57:01 PM	SiCl4 post valve closed
3/30/2010	9:57:01 PM	Main Vac valve closed
3/30/2010	9:57:01 PM	Bubbler valve closed
3/30/2010	9:57:01 PM	Bypass valve opened
3/30/2010	9:57:01 PM	Helium MFC set to  0.000000
3/30/2010	9:57:01 PM	H2 MFC set to  0.000000
3/30/2010	9:57:01 PM	BCl3 MFC set to  0.000000
3/30/2010	9:57:01 PM	SiCl4 MFC set to  0.000000
3/30/2010	9:57:01 PM	Bypass solenoid MFC set to  0.000000
3/30/2010	9:57:01 PM	Tube furnace set to 0
3/30/2010	9:57:23 PM	Helium valve closed
3/30/2010	9:57:23 PM	H2 valve closed
3/30/2010	9:57:23 PM	BCl3 valve closed
3/30/2010	9:57:23 PM	PH3 valve closed
3/30/2010	9:57:23 PM	SiCl4 pre valve closed
3/30/2010	9:57:23 PM	SiCl4 post valve closed
3/30/2010	9:57:23 PM	Bubbler valve closed
3/30/2010	9:57:23 PM	Main Vac valve opened
3/30/2010	9:57:23 PM	Bypass valve opened
3/30/2010	9:57:23 PM	Helium MFC set to  0.000000
3/30/2010	9:57:23 PM	H2 MFC set to  0.000000
3/30/2010	9:57:23 PM	BCl3 MFC set to  0.000000
3/30/2010	9:57:23 PM	SiCl4 MFC set to  0.000000
3/30/2010	9:57:23 PM	Bypass solenoid MFC set to  0.000000
3/30/2010	9:57:23 PM	Tube furnace set to 0
3/30/2010	10:02:23 PM	Helium valve closed
3/30/2010	10:02:23 PM	H2 valve closed
3/30/2010	10:02:23 PM	BCl3 valve closed
3/30/2010	10:02:23 PM	PH3 valve closed
3/30/2010	10:02:23 PM	SiCl4 pre valve closed
3/30/2010	10:02:23 PM	SiCl4 post valve closed
3/30/2010	10:02:23 PM	Bubbler valve closed
3/30/2010	10:02:23 PM	Main Vac valve opened
3/30/2010	10:02:23 PM	Bypass valve opened
3/30/2010	10:02:23 PM	Helium MFC set to  0.000000
3/30/2010	10:02:23 PM	H2 MFC set to  0.000000
3/30/2010	10:02:23 PM	BCl3 MFC set to  0.000000
3/30/2010	10:02:23 PM	SiCl4 MFC set to  0.000000
3/30/2010	10:02:23 PM	Bypass solenoid MFC set to  0.000000
3/30/2010	10:02:24 PM	Tube furnace set to 0
3/30/2010	10:02:25 PM	Run finished at 10:02 PM
3/30/2010	10:02:25 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\3x_vent_pumpdown.xml
3/30/2010	10:25:38 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
3/30/2010	10:25:38 PM	Recipe started at 10:25 PM
3/30/2010	10:25:38 PM	Helium valve closed
3/30/2010	10:25:38 PM	H2 valve closed
3/30/2010	10:25:38 PM	BCl3 valve closed
3/30/2010	10:25:38 PM	PH3 valve closed
3/30/2010	10:25:38 PM	SiCl4 pre valve closed
3/30/2010	10:25:38 PM	SiCl4 post valve closed
3/30/2010	10:25:38 PM	Main Vac valve closed
3/30/2010	10:25:38 PM	Bypass valve closed
3/30/2010	10:25:38 PM	Bubbler valve closed
3/30/2010	10:25:38 PM	Helium MFC set to  0.000000
3/30/2010	10:25:38 PM	H2 MFC set to  0.000000
3/30/2010	10:25:38 PM	BCl3 MFC set to  0.000000
3/30/2010	10:25:38 PM	SiCl4 MFC set to  0.000000
3/30/2010	10:25:39 PM	Bypass solenoid MFC set to  0.000000
3/30/2010	10:25:39 PM	Tube furnace set to 0
3/30/2010	10:25:39 PM	Run finished at 10:25 PM
3/30/2010	10:25:39 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
3/30/2010	10:25:58 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/30/2010	10:25:58 PM	Recipe started at 10:25 PM
3/30/2010	10:25:58 PM	Helium valve closed
3/30/2010	10:25:58 PM	H2 valve closed
3/30/2010	10:25:58 PM	BCl3 valve closed
3/30/2010	10:25:58 PM	PH3 valve closed
3/30/2010	10:25:58 PM	SiCl4 pre valve closed
3/30/2010	10:25:58 PM	SiCl4 post valve closed
3/30/2010	10:25:58 PM	Main Vac valve closed
3/30/2010	10:25:58 PM	Bubbler valve closed
3/30/2010	10:25:58 PM	Bypass valve opened
3/30/2010	10:25:58 PM	Helium MFC set to  0.000000
3/30/2010	10:25:58 PM	H2 MFC set to  0.000000
3/30/2010	10:25:58 PM	BCl3 MFC set to  0.000000
3/30/2010	10:25:58 PM	SiCl4 MFC set to  0.000000
3/30/2010	10:25:58 PM	Bypass solenoid MFC set to  0.000000
3/30/2010	10:25:59 PM	Tube furnace set to 0
3/30/2010	10:25:59 PM	Helium valve closed
3/30/2010	10:25:59 PM	H2 valve closed
3/30/2010	10:25:59 PM	BCl3 valve closed
3/30/2010	10:25:59 PM	PH3 valve closed
3/30/2010	10:25:59 PM	SiCl4 pre valve closed
3/30/2010	10:25:59 PM	SiCl4 post valve closed
3/30/2010	10:25:59 PM	Bubbler valve closed
3/30/2010	10:25:59 PM	Main Vac valve opened
3/30/2010	10:25:59 PM	Bypass valve opened
3/30/2010	10:25:59 PM	Helium MFC set to  0.000000
3/30/2010	10:25:59 PM	H2 MFC set to  0.000000
3/30/2010	10:25:59 PM	BCl3 MFC set to  0.000000
3/30/2010	10:25:59 PM	SiCl4 MFC set to  0.000000
3/30/2010	10:25:59 PM	Bypass solenoid MFC set to  0.000000
3/30/2010	10:25:59 PM	Tube furnace set to 0
3/30/2010	10:25:59 PM	Run finished at 10:25 PM
3/30/2010	10:25:59 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/30/2010	10:26:59 PM	Recipe started at 10:26 PM
3/30/2010	10:26:59 PM	Helium valve closed
3/30/2010	10:26:59 PM	BCl3 valve closed
3/30/2010	10:26:59 PM	PH3 valve closed
3/30/2010	10:26:59 PM	SiCl4 pre valve closed
3/30/2010	10:26:59 PM	SiCl4 post valve closed
3/30/2010	10:26:59 PM	Main Vac valve closed
3/30/2010	10:26:59 PM	Bypass valve closed
3/30/2010	10:26:59 PM	Bubbler valve closed
3/30/2010	10:26:59 PM	H2 valve opened
3/30/2010	10:26:59 PM	Helium MFC set to  0.000000
3/30/2010	10:26:59 PM	H2 MFC set to  500.000000
3/30/2010	10:26:59 PM	BCl3 MFC set to  0.000000
3/30/2010	10:26:59 PM	SiCl4 MFC set to  0.000000
3/30/2010	10:26:59 PM	Bypass solenoid MFC set to  0.000000
3/30/2010	10:26:59 PM	Tube furnace set to 0
3/30/2010	10:28:22 PM	Helium valve closed
3/30/2010	10:28:22 PM	BCl3 valve closed
3/30/2010	10:28:22 PM	PH3 valve closed
3/30/2010	10:28:22 PM	SiCl4 pre valve closed
3/30/2010	10:28:22 PM	SiCl4 post valve closed
3/30/2010	10:28:22 PM	Main Vac valve closed
3/30/2010	10:28:22 PM	Bypass valve closed
3/30/2010	10:28:22 PM	H2 valve opened
3/30/2010	10:28:22 PM	Bubbler valve opened
3/30/2010	10:28:22 PM	Helium MFC set to  0.000000
3/30/2010	10:28:22 PM	H2 MFC set to  500.000000
3/30/2010	10:28:22 PM	BCl3 MFC set to  0.000000
3/30/2010	10:28:22 PM	SiCl4 MFC set to  0.000000
3/30/2010	10:28:22 PM	Bypass solenoid MFC set to  0.000000
3/30/2010	10:28:22 PM	Tube furnace set to 1000
3/30/2010	10:48:22 PM	Helium valve closed
3/30/2010	10:48:22 PM	BCl3 valve closed
3/30/2010	10:48:22 PM	PH3 valve closed
3/30/2010	10:48:22 PM	Main Vac valve closed
3/30/2010	10:48:22 PM	Bypass valve closed
3/30/2010	10:48:22 PM	H2 valve opened
3/30/2010	10:48:22 PM	SiCl4 pre valve opened
3/30/2010	10:48:22 PM	SiCl4 post valve opened
3/30/2010	10:48:22 PM	Bubbler valve opened
3/30/2010	10:48:22 PM	Helium MFC set to  0.000000
3/30/2010	10:48:22 PM	H2 MFC set to  500.000000
3/30/2010	10:48:22 PM	BCl3 MFC set to  0.000000
3/30/2010	10:48:22 PM	SiCl4 MFC set to  325.000000
3/30/2010	10:48:22 PM	Bypass solenoid MFC set to  0.000000
3/30/2010	10:48:22 PM	Tube furnace set to 1000
3/30/2010	11:28:22 PM	H2 valve closed
3/30/2010	11:28:22 PM	BCl3 valve closed
3/30/2010	11:28:22 PM	PH3 valve closed
3/30/2010	11:28:22 PM	SiCl4 pre valve closed
3/30/2010	11:28:22 PM	SiCl4 post valve closed
3/30/2010	11:28:22 PM	Main Vac valve closed
3/30/2010	11:28:22 PM	Bypass valve closed
3/30/2010	11:28:22 PM	Helium valve opened
3/30/2010	11:28:22 PM	Bubbler valve opened
3/30/2010	11:28:22 PM	Helium MFC set to  500.000000
3/30/2010	11:28:22 PM	H2 MFC set to  0.000000
3/30/2010	11:28:22 PM	BCl3 MFC set to  0.000000
3/30/2010	11:28:22 PM	SiCl4 MFC set to  0.000000
3/30/2010	11:28:22 PM	Bypass solenoid MFC set to  0.000000
3/30/2010	11:28:22 PM	Tube furnace set to 750
3/30/2010	11:48:22 PM	H2 valve closed
3/30/2010	11:48:22 PM	BCl3 valve closed
3/30/2010	11:48:22 PM	PH3 valve closed
3/30/2010	11:48:22 PM	SiCl4 pre valve closed
3/30/2010	11:48:22 PM	SiCl4 post valve closed
3/30/2010	11:48:22 PM	Main Vac valve closed
3/30/2010	11:48:22 PM	Bypass valve closed
3/30/2010	11:48:22 PM	Helium valve opened
3/30/2010	11:48:22 PM	Bubbler valve opened
3/30/2010	11:48:22 PM	Helium MFC set to  500.000000
3/30/2010	11:48:22 PM	H2 MFC set to  0.000000
3/30/2010	11:48:22 PM	BCl3 MFC set to  0.000000
3/30/2010	11:48:22 PM	SiCl4 MFC set to  0.000000
3/30/2010	11:48:22 PM	Bypass solenoid MFC set to  0.000000
3/30/2010	11:48:22 PM	Tube furnace set to 0
